JPH02105483A - Laser oscillation device - Google Patents
Laser oscillation deviceInfo
- Publication number
- JPH02105483A JPH02105483A JP25699688A JP25699688A JPH02105483A JP H02105483 A JPH02105483 A JP H02105483A JP 25699688 A JP25699688 A JP 25699688A JP 25699688 A JP25699688 A JP 25699688A JP H02105483 A JPH02105483 A JP H02105483A
- Authority
- JP
- Japan
- Prior art keywords
- rod
- mirror
- metal rod
- temperature
- shaped member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010355 oscillation Effects 0.000 title claims description 6
- 239000000498 cooling water Substances 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 abstract description 30
- 229910052751 metal Inorganic materials 0.000 abstract description 30
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052742 iron Inorganic materials 0.000 abstract description 6
- 239000011810 insulating material Substances 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract 1
- 238000007796 conventional method Methods 0.000 description 3
- 230000008602 contraction Effects 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/025—Constructional details of solid state lasers, e.g. housings or mountings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/04—Arrangements for thermal management
- H01S3/0401—Arrangements for thermal management of optical elements being part of laser resonator, e.g. windows, mirrors, lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/04—Arrangements for thermal management
- H01S3/0407—Liquid cooling, e.g. by water
Abstract
Description
【発明の詳細な説明】
〔発明の目的〕
（産業上の利用分野）
本発明は共振器長を制御することができるようなレーザ
発振装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a laser oscillation device that can control the resonator length.
（従来の技術）
従来の技術を第２図を用いて説明する。従来は共振器長
をミクロンのオーダーで制御する必要がある場合、出力
ミラー４またはりアミラー３にピエゾ素子１を取付、コ
ントローラー２にてピエゾ素子１にかける電圧をコント
ロールする事によりピエゾ素子１の長さを制御し、共振
器長を制御していた。この際ピエゾ素子１にかける電圧
はＯ〜数百、数千Ｖでピエゾ素子１の伸びは数十ミクロ
ンであり１価格も高価なものである。(Prior Art) The conventional art will be explained using FIG. 2. Conventionally, when it is necessary to control the resonator length on the order of microns, the piezo element 1 is attached to the output mirror 4 or rear mirror 3, and the voltage applied to the piezo element 1 is controlled by the controller 2. The length was controlled and the resonator length was controlled. At this time, the voltage applied to the piezo element 1 is from 0 to several hundreds to several thousand volts, the elongation of the piezo element 1 is several tens of microns, and the price is high.
第２図はりアミラー３にピエゾ素子１を取り付けたもの
である。FIG. 2 shows a piezo element 1 attached to a beam mirror 3.
（発明が解決しようとする課題）
ところが従来のピエゾ素子による方式では、価格が高く
、また数十ミクロン程度の共振器長制御しかできないと
いった問題点があった。(Problems to be Solved by the Invention) However, the conventional method using piezo elements has problems in that it is expensive and the resonator length can only be controlled to a few tens of microns.
本発明は従来の方式の問題点を解決し、安価で数十ミク
ロン以上の共振器長制御を可能とするレーザ発振装置を
提供することを目的とする。SUMMARY OF THE INVENTION An object of the present invention is to provide a laser oscillation device that solves the problems of the conventional method and enables control of a resonator length of several tens of microns or more at low cost.
（課題を解決するための手段）
本発明はミラーをミラーホルダーに取り付け、ミラーホ
ルダーに中心部が水を流せるようになっている中空の金
属棒を取り付ける。本構成では一定の熱膨張係数を持つ
部材として金属棒を用い、リアー側に取り付けるものと
する。金属棒にはヒーターが巻き付であり、ヒーター電
源に接続されている。金属棒は水槽よりホースにて配管
されており、金属棒の中に水を流せるようになっている
。(Means for Solving the Problems) The present invention attaches a mirror to a mirror holder, and attaches to the mirror holder a hollow metal rod whose center allows water to flow. In this configuration, a metal rod is used as a member having a constant coefficient of thermal expansion, and is attached to the rear side. A heater is wrapped around the metal rod and connected to the heater power source. The metal rod is connected to the water tank with a hose, allowing water to flow into the metal rod.
また途中にバルブがもうけである。また金属棒には温度
計が取り付けてあり、温度表示器により、金属棒の温度
が測定できるようになっている。Also, there is a valve on the way that is profitable. A thermometer is attached to the metal rod, and a temperature indicator allows the temperature of the metal rod to be measured.
（作 用）
ヒーター電源の電圧コントロールおよびバルブにより金
属棒中を流れる水量を調節することにより金属棒の温度
を制御する。金属棒の温度は温度表示器に示され共振器
長を一定に保つためには金属棒の温度を一定に保つ。ま
た共振器長を制御する場合は、金属棒の熱には伸縮αよ
り次式で求まる金属棒温度変化量へＴだけ温度をコント
ロールすればよい。(Function) The temperature of the metal rod is controlled by controlling the voltage of the heater power source and adjusting the amount of water flowing through the metal rod using a valve. The temperature of the metal rod is shown on the temperature display, and in order to keep the resonator length constant, the temperature of the metal rod is kept constant. In addition, when controlling the resonator length, the temperature of the metal rod can be controlled by T to the amount of change in temperature of the metal rod obtained from the expansion/contraction α by the following equation.
ΔＬ ＝ α Ｘ ΔＴ
・・・■
ΔＬ・・・磁振器長変化ｍ
α ・・・熱による伸縮ｍｍ／’Ｃ
ΔＴ・・・金属棒温度変化℃
また金属棒と低膨張率の棒（以下共振器支持棒）および
ミラーホルダー６の間は断熱材が金属棒とミラーの間は
ミラーホルダーが入っており、金属棒の百度が他の部分
へ影響を及ぼさないようになっている。ΔL = α A heat insulating material is placed between the resonator support rod (resonator support rod) and the mirror holder 6, and a mirror holder is placed between the metal rod and the mirror, so that the angle of the metal rod does not affect other parts.
（実施例）
本実施例ではりアミラーに金属棒を取り付けた例を示す
。第１図に示すように、リアミラー３゜出力ミラー４の
２つのミラーでレーザの共振器７を構成し、出力ミラー
はミラーホルダー６によって保持され、共振器支持棒５
に固定されている。(Example) This example shows an example in which a metal rod is attached to a beam mirror. As shown in FIG. 1, a laser resonator 7 is composed of two mirrors: a rear mirror 3 and an output mirror 4. The output mirror is held by a mirror holder 6, and the resonator support rod 5
is fixed.
リアミラー３もミラーホルダー６によって保持されてい
るが、断熱材１４を介して金属棒１２に取り付けられて
いる。金属棒１２にはヒーター１が巻き付けてあり、温
度測定器の温度測定部１０も取り付けである。金属棒１
２は中空であり、中を水槽９より冷却水が流せるように
なっていた。ヒーター電源２の電圧をコントロー・ル及
び冷却水流旦をバルブ８によりコントロールする事によ
り金属ＪＰｔ／１１２の温度を制御し、その温度は温度
表示器１１に表示される。金属棒１２は断熱材１４を介
して共振器支持棒５に支えられているため、金属棒１２
の温度が共振器支持棒５およびリアミラー３に影響を及
ぼさない構成になっている。The rear mirror 3 is also held by a mirror holder 6, but is attached to a metal rod 12 via a heat insulating material 14. A heater 1 is wound around the metal rod 12, and a temperature measuring section 10 of a temperature measuring device is also attached. metal rod 1
2 was hollow, and cooling water from a water tank 9 could flow through it. The temperature of the metal JPt/112 is controlled by controlling the voltage of the heater power source 2 and the flow rate of the cooling water using the valve 8, and the temperature is displayed on the temperature display 11. Since the metal rod 12 is supported by the resonator support rod 5 via the heat insulating material 14, the metal rod 12
The structure is such that the temperature does not affect the resonator support rod 5 and the rear mirror 3.
金属棒１２として鉄を用いると、鉄の線膨張率β＝ １
２ Ｘ １０−’である事より
ただしβ＝ １ ｄＲ（ｎｏはＯ”Ｃの時の長さ）２
゜ ｄｔ
したがって１００ａａの鉄棒を用いれば熱による伸縮α
は
Ｎ
””ｄｔ”β−４＝ １２Ｘ１０−Ｘ１００ ＝ １２
Ｘ１０−’ （ｍｕ／’Ｃ）＝１．２［ミクロン／℃］
となり温度を１℃変化させると１．２ミクロン、１００
℃変化させると１２０ミクロン鉄棒が伸び、共振器長が
変化する事になる。When iron is used as the metal rod 12, the linear expansion coefficient β of iron is 1
Since 2 x 10-', β = 1 dR (no is the length when O''C) 2
゜ dt Therefore, if a 100aa iron rod is used, the expansion and contraction due to heat α
is N ""dt" β-4 = 12X10-X100 = 12
X10-'(mu/'C) = 1.2 [microns/℃], so if the temperature is changed by 1℃, it becomes 1.2 microns, 100
When the temperature is changed, the 120 micron iron rod stretches and the resonator length changes.
ヒーター１と冷却水により温度をコントロールしてやる
と、金属棒１２が鉄の場合Ｏ〜数百ミクロンの共振器制
御が可能であり、かつ大変安価な制御装置となる。If the temperature is controlled by the heater 1 and cooling water, if the metal rod 12 is made of iron, resonator control of 0 to several hundred microns is possible, and the control device becomes very inexpensive.
第３図に他の実施側を示す。共振器支持棒５にヒーター
１を巻き付は温度測定部１０を取り付け、共振器支持棒
内部に冷却水を通す事によっても同様な制御装置が実現
可能である。FIG. 3 shows another implementation side. A similar control device can also be realized by wrapping the heater 1 around the resonator support rod 5, attaching the temperature measuring section 10, and passing cooling water through the inside of the resonator support rod.
〔発明の効果〕
以上のようにヒーターと冷却水、Ｕ度肝、熱膨張係数一
定の棒状部材を用いる事により、安価でかつＯ〜数百ミ
クロンの共振器長制御で可能とするレーザ発振装置を得
ることができる。[Effects of the Invention] As described above, by using a heater, cooling water, a rod-shaped member with a constant U temperature, and a constant coefficient of thermal expansion, a laser oscillation device that is inexpensive and capable of controlling the resonator length from 0 to several hundred microns has been created. Obtainable.
第１図は本発明の一実施例を示す正面図、第２図は従来
の技術を示す正面図、第３図は本発明の他の実施例を示
す正面図である。
１・・・ヒーター ２・・・ヒーター電源３・・
・リアミラー ４・・・出力ミラー５・・・共振器
支持ｎ ６・・・ミラーホルダー７・・・共振器
９・・・水槽
１１・・・温度表示器
１３・・・ホース
８・・・バルブ
１０・・・温度測定部
１２・・・金属棒
１４・・・断熱材FIG. 1 is a front view showing one embodiment of the present invention, FIG. 2 is a front view showing a conventional technique, and FIG. 3 is a front view showing another embodiment of the present invention. 1... Heater 2... Heater power supply 3...
・Rear mirror 4...Output mirror 5...Resonator support n 6...Mirror holder 7...Resonator 9...Water tank 11...Temperature indicator 13...Hose 8...Valve 10...Temperature measurement part 12...Metal rod 14...Insulating material
Claims (1)
ミラーにて共振器を構成しているレーザ発振装置におい
て、 少なくとも一方のミラーに一定の熱膨張係数を持つ棒状
部材を取り付け、その棒状部材にはヒーターを巻きつけ
、温度センサーを取り付け、棒状部材内部は冷却水を流
れるようにし、その棒状部材を介してミラーが低膨張率
の棒に支持されている事を特徴とするレーザ発振装置。[Claims] In a laser oscillation device in which a pair of mirrors is supported at both ends of a rod with a low coefficient of expansion and the pair of mirrors constitutes a resonator, at least one of the mirrors has a rod shape with a constant coefficient of thermal expansion. Attach the member, wrap a heater around the rod-shaped member, attach a temperature sensor, allow cooling water to flow inside the rod-shaped member, and confirm that the mirror is supported by a rod with a low expansion coefficient through the rod-shaped member. Characteristic laser oscillation device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25699688A JPH02105483A (en) | 1988-10-14 | 1988-10-14 | Laser oscillation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25699688A JPH02105483A (en) | 1988-10-14 | 1988-10-14 | Laser oscillation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02105483A true JPH02105483A (en) | 1990-04-18 |
Family
ID=17300272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25699688A Pending JPH02105483A (en) | 1988-10-14 | 1988-10-14 | Laser oscillation device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02105483A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996005636A1 (en) * | 1994-08-09 | 1996-02-22 | Nwl Laser-Technologie Gmbh | Laser resonator |
| WO1996005637A1 (en) * | 1994-08-09 | 1996-02-22 | Rofin-Sinar Laser Gmbh | Laser system with compensated optics |
| CN104634845A (en) * | 2013-11-06 | 2015-05-20 | 日本特殊陶业株式会社 | Heater and gas sensor |
-
1988
- 1988-10-14 JP JP25699688A patent/JPH02105483A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996005636A1 (en) * | 1994-08-09 | 1996-02-22 | Nwl Laser-Technologie Gmbh | Laser resonator |
| WO1996005637A1 (en) * | 1994-08-09 | 1996-02-22 | Rofin-Sinar Laser Gmbh | Laser system with compensated optics |
| CN104634845A (en) * | 2013-11-06 | 2015-05-20 | 日本特殊陶业株式会社 | Heater and gas sensor |
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