JPH02104963U - - Google Patents
Info
- Publication number
- JPH02104963U JPH02104963U JP1198989U JP1198989U JPH02104963U JP H02104963 U JPH02104963 U JP H02104963U JP 1198989 U JP1198989 U JP 1198989U JP 1198989 U JP1198989 U JP 1198989U JP H02104963 U JPH02104963 U JP H02104963U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- wafer
- liquid supply
- utility
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000013078 crystal Substances 0.000 description 1
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1198989U JPH02104963U (nl) | 1989-02-03 | 1989-02-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1198989U JPH02104963U (nl) | 1989-02-03 | 1989-02-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02104963U true JPH02104963U (nl) | 1990-08-21 |
Family
ID=31221029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1198989U Pending JPH02104963U (nl) | 1989-02-03 | 1989-02-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02104963U (nl) |
-
1989
- 1989-02-03 JP JP1198989U patent/JPH02104963U/ja active Pending