JPH02104877U - - Google Patents

Info

Publication number
JPH02104877U
JPH02104877U JP1222589U JP1222589U JPH02104877U JP H02104877 U JPH02104877 U JP H02104877U JP 1222589 U JP1222589 U JP 1222589U JP 1222589 U JP1222589 U JP 1222589U JP H02104877 U JPH02104877 U JP H02104877U
Authority
JP
Japan
Prior art keywords
base material
slit nozzle
travel
liquid supply
supply device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1222589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1222589U priority Critical patent/JPH02104877U/ja
Publication of JPH02104877U publication Critical patent/JPH02104877U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1222589U 1989-02-06 1989-02-06 Pending JPH02104877U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1222589U JPH02104877U (zh) 1989-02-06 1989-02-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1222589U JPH02104877U (zh) 1989-02-06 1989-02-06

Publications (1)

Publication Number Publication Date
JPH02104877U true JPH02104877U (zh) 1990-08-21

Family

ID=31221483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1222589U Pending JPH02104877U (zh) 1989-02-06 1989-02-06

Country Status (1)

Country Link
JP (1) JPH02104877U (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013132771A1 (ja) * 2012-03-06 2013-09-12 東京エレクトロン株式会社 太陽電池製造用のスリットノズル及び薬液塗布装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5116214A (zh) * 1974-07-31 1976-02-09 Mitsubishi Electric Corp
JPS6087874A (ja) * 1983-10-19 1985-05-17 サンデイー・ヒル・コーポレーシヨン 自由落下カーテン制御方式塗布方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5116214A (zh) * 1974-07-31 1976-02-09 Mitsubishi Electric Corp
JPS6087874A (ja) * 1983-10-19 1985-05-17 サンデイー・ヒル・コーポレーシヨン 自由落下カーテン制御方式塗布方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013132771A1 (ja) * 2012-03-06 2013-09-12 東京エレクトロン株式会社 太陽電池製造用のスリットノズル及び薬液塗布装置

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