JPH02104877U - - Google Patents
Info
- Publication number
- JPH02104877U JPH02104877U JP1222589U JP1222589U JPH02104877U JP H02104877 U JPH02104877 U JP H02104877U JP 1222589 U JP1222589 U JP 1222589U JP 1222589 U JP1222589 U JP 1222589U JP H02104877 U JPH02104877 U JP H02104877U
- Authority
- JP
- Japan
- Prior art keywords
- base material
- slit nozzle
- travel
- liquid supply
- supply device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims 2
- 238000007599 discharging Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1222589U JPH02104877U (US08118993-20120221-C00002.png) | 1989-02-06 | 1989-02-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1222589U JPH02104877U (US08118993-20120221-C00002.png) | 1989-02-06 | 1989-02-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02104877U true JPH02104877U (US08118993-20120221-C00002.png) | 1990-08-21 |
Family
ID=31221483
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1222589U Pending JPH02104877U (US08118993-20120221-C00002.png) | 1989-02-06 | 1989-02-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02104877U (US08118993-20120221-C00002.png) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013132771A1 (ja) * | 2012-03-06 | 2013-09-12 | 東京エレクトロン株式会社 | 太陽電池製造用のスリットノズル及び薬液塗布装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5116214A (US08118993-20120221-C00002.png) * | 1974-07-31 | 1976-02-09 | Mitsubishi Electric Corp | |
JPS6087874A (ja) * | 1983-10-19 | 1985-05-17 | サンデイー・ヒル・コーポレーシヨン | 自由落下カーテン制御方式塗布方法 |
-
1989
- 1989-02-06 JP JP1222589U patent/JPH02104877U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5116214A (US08118993-20120221-C00002.png) * | 1974-07-31 | 1976-02-09 | Mitsubishi Electric Corp | |
JPS6087874A (ja) * | 1983-10-19 | 1985-05-17 | サンデイー・ヒル・コーポレーシヨン | 自由落下カーテン制御方式塗布方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013132771A1 (ja) * | 2012-03-06 | 2013-09-12 | 東京エレクトロン株式会社 | 太陽電池製造用のスリットノズル及び薬液塗布装置 |