JPH02104631U - - Google Patents
Info
- Publication number
- JPH02104631U JPH02104631U JP1190589U JP1190589U JPH02104631U JP H02104631 U JPH02104631 U JP H02104631U JP 1190589 U JP1190589 U JP 1190589U JP 1190589 U JP1190589 U JP 1190589U JP H02104631 U JPH02104631 U JP H02104631U
- Authority
- JP
- Japan
- Prior art keywords
- lift mechanism
- wafer stage
- reciprocates
- support frame
- inert gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000007664 blowing Methods 0.000 claims 2
- 238000001312 dry etching Methods 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1190589U JPH02104631U (enExample) | 1989-02-03 | 1989-02-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1190589U JPH02104631U (enExample) | 1989-02-03 | 1989-02-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02104631U true JPH02104631U (enExample) | 1990-08-20 |
Family
ID=31220871
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1190589U Pending JPH02104631U (enExample) | 1989-02-03 | 1989-02-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02104631U (enExample) |
-
1989
- 1989-02-03 JP JP1190589U patent/JPH02104631U/ja active Pending