JPH02104631U - - Google Patents

Info

Publication number
JPH02104631U
JPH02104631U JP1190589U JP1190589U JPH02104631U JP H02104631 U JPH02104631 U JP H02104631U JP 1190589 U JP1190589 U JP 1190589U JP 1190589 U JP1190589 U JP 1190589U JP H02104631 U JPH02104631 U JP H02104631U
Authority
JP
Japan
Prior art keywords
lift mechanism
wafer stage
reciprocates
support frame
inert gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1190589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1190589U priority Critical patent/JPH02104631U/ja
Publication of JPH02104631U publication Critical patent/JPH02104631U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1190589U 1989-02-03 1989-02-03 Pending JPH02104631U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1190589U JPH02104631U (enrdf_load_stackoverflow) 1989-02-03 1989-02-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1190589U JPH02104631U (enrdf_load_stackoverflow) 1989-02-03 1989-02-03

Publications (1)

Publication Number Publication Date
JPH02104631U true JPH02104631U (enrdf_load_stackoverflow) 1990-08-20

Family

ID=31220871

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1190589U Pending JPH02104631U (enrdf_load_stackoverflow) 1989-02-03 1989-02-03

Country Status (1)

Country Link
JP (1) JPH02104631U (enrdf_load_stackoverflow)

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