JPH02104630U - - Google Patents

Info

Publication number
JPH02104630U
JPH02104630U JP15341388U JP15341388U JPH02104630U JP H02104630 U JPH02104630 U JP H02104630U JP 15341388 U JP15341388 U JP 15341388U JP 15341388 U JP15341388 U JP 15341388U JP H02104630 U JPH02104630 U JP H02104630U
Authority
JP
Japan
Prior art keywords
fixing plate
support rod
sensor part
portions
reinforcing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15341388U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0627953Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988153413U priority Critical patent/JPH0627953Y2/ja
Publication of JPH02104630U publication Critical patent/JPH02104630U/ja
Application granted granted Critical
Publication of JPH0627953Y2 publication Critical patent/JPH0627953Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Packaging Frangible Articles (AREA)
JP1988153413U 1988-11-25 1988-11-25 Ｉｃ用ボート Expired - Fee Related JPH0627953Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988153413U JPH0627953Y2 (ja) 1988-11-25 1988-11-25 Ｉｃ用ボート

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988153413U JPH0627953Y2 (ja) 1988-11-25 1988-11-25 Ｉｃ用ボート

Publications (2)

Publication Number Publication Date
JPH02104630U true JPH02104630U (enExample) 1990-08-20
JPH0627953Y2 JPH0627953Y2 (ja) 1994-07-27

Family

ID=31429231

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988153413U Expired - Fee Related JPH0627953Y2 (ja) 1988-11-25 1988-11-25 Ｉｃ用ボート

Country Status (1)

Country Link
JP (1) JPH0627953Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021157722A1 (ja) * 2020-02-07 2021-08-12 京セラ株式会社 ウェハーボート

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53148283A (en) * 1977-05-30 1978-12-23 Toshiba Ceramics Co Silicon wafer jig
JPS5920629U (ja) * 1982-07-30 1984-02-08 株式会社テクニスコ 拡散治具
JPS5923731U (ja) * 1982-08-05 1984-02-14 株式会社テクニスコ 拡散治具
JPS5940443U (ja) * 1982-09-08 1984-03-15 三井造船株式会社 赤道リング建造用吊足場
JPS614227A (ja) * 1984-06-18 1986-01-10 Sharp Corp ウエハ−ボ−ト位置検出方式
JPS6142833U (ja) * 1984-08-21 1986-03-19 株式会社東芝 半導体製造装置用ウエハ保持具
JPS63228636A (ja) * 1987-03-18 1988-09-22 Toshiba Corp ウエハ移載装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53148283A (en) * 1977-05-30 1978-12-23 Toshiba Ceramics Co Silicon wafer jig
JPS5920629U (ja) * 1982-07-30 1984-02-08 株式会社テクニスコ 拡散治具
JPS5923731U (ja) * 1982-08-05 1984-02-14 株式会社テクニスコ 拡散治具
JPS5940443U (ja) * 1982-09-08 1984-03-15 三井造船株式会社 赤道リング建造用吊足場
JPS614227A (ja) * 1984-06-18 1986-01-10 Sharp Corp ウエハ−ボ−ト位置検出方式
JPS6142833U (ja) * 1984-08-21 1986-03-19 株式会社東芝 半導体製造装置用ウエハ保持具
JPS63228636A (ja) * 1987-03-18 1988-09-22 Toshiba Corp ウエハ移載装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021157722A1 (ja) * 2020-02-07 2021-08-12 京セラ株式会社 ウェハーボート
JPWO2021157722A1 (enExample) * 2020-02-07 2021-08-12

Also Published As

Publication number Publication date
JPH0627953Y2 (ja) 1994-07-27

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees