JPH0210362B2 - - Google Patents
Info
- Publication number
- JPH0210362B2 JPH0210362B2 JP1158179A JP1158179A JPH0210362B2 JP H0210362 B2 JPH0210362 B2 JP H0210362B2 JP 1158179 A JP1158179 A JP 1158179A JP 1158179 A JP1158179 A JP 1158179A JP H0210362 B2 JPH0210362 B2 JP H0210362B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- hologram
- diffuser plate
- interference fringes
- displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006073 displacement reaction Methods 0.000 claims description 19
- 230000033001 locomotion Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 3
- 238000001093 holography Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000003491 array Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 206010041662 Splinter Diseases 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000005337 ground glass Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1158179A JPS55103402A (en) | 1979-02-03 | 1979-02-03 | Linear gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1158179A JPS55103402A (en) | 1979-02-03 | 1979-02-03 | Linear gauge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55103402A JPS55103402A (en) | 1980-08-07 |
| JPH0210362B2 true JPH0210362B2 (US20020128544A1-20020912-P00008.png) | 1990-03-07 |
Family
ID=11781866
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1158179A Granted JPS55103402A (en) | 1979-02-03 | 1979-02-03 | Linear gauge |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55103402A (US20020128544A1-20020912-P00008.png) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4466693A (en) * | 1980-11-25 | 1984-08-21 | Agency Of Industrial Science And Technology | Holographic straightness meter |
| JP4774269B2 (ja) * | 2005-10-07 | 2011-09-14 | 株式会社ミツトヨ | 変位センサ |
-
1979
- 1979-02-03 JP JP1158179A patent/JPS55103402A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55103402A (en) | 1980-08-07 |
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