JPH02102466U - - Google Patents

Info

Publication number

JPH02102466U

JPH02102466U JP971489U JP971489U JPH02102466U JP H02102466 U JPH02102466 U JP H02102466U JP 971489 U JP971489 U JP 971489U JP 971489 U JP971489 U JP 971489U JP H02102466 U JPH02102466 U JP H02102466U

Authority

JP

Japan

Prior art keywords

substrate

treatment apparatus

seal flange

surface treatment

vacuum

Prior art date

1989-01-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010438 heat treatment Methods 0.000 claims description 12
• 239000000758 substrate Substances 0.000 claims description 10
• 239000000498 cooling water Substances 0.000 claims description 2
• 238000004381 surface treatment Methods 0.000 claims 3
• 238000010586 diagram Methods 0.000 description 4
• 238000001816 cooling Methods 0.000 description 2
• 239000002184 metal Substances 0.000 description 2
• 239000000919 ceramic Substances 0.000 description 1
• 239000007789 gas Substances 0.000 description 1
• 239000012495 reaction gas Substances 0.000 description 1
• 239000010409 thin film Substances 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1