JPH02102464U - - Google Patents
Info
- Publication number
- JPH02102464U JPH02102464U JP934089U JP934089U JPH02102464U JP H02102464 U JPH02102464 U JP H02102464U JP 934089 U JP934089 U JP 934089U JP 934089 U JP934089 U JP 934089U JP H02102464 U JPH02102464 U JP H02102464U
- Authority
- JP
- Japan
- Prior art keywords
- lamp
- thin film
- heater
- heating
- vacuum thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 5
- 239000010409 thin film Substances 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 3
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
Landscapes
- Control Of Resistance Heating (AREA)
- Physical Vapour Deposition (AREA)
- Control Of Temperature (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP934089U JPH02102464U (enExample) | 1989-01-31 | 1989-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP934089U JPH02102464U (enExample) | 1989-01-31 | 1989-01-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02102464U true JPH02102464U (enExample) | 1990-08-15 |
Family
ID=31216004
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP934089U Pending JPH02102464U (enExample) | 1989-01-31 | 1989-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02102464U (enExample) |
-
1989
- 1989-01-31 JP JP934089U patent/JPH02102464U/ja active Pending
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