JPH02102462U - - Google Patents

Info

Publication number
JPH02102462U
JPH02102462U JP1010689U JP1010689U JPH02102462U JP H02102462 U JPH02102462 U JP H02102462U JP 1010689 U JP1010689 U JP 1010689U JP 1010689 U JP1010689 U JP 1010689U JP H02102462 U JPH02102462 U JP H02102462U
Authority
JP
Japan
Prior art keywords
vacuum evaporation
power transmission
transmission system
rotational force
transmits rotational
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1010689U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0730678Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1010689U priority Critical patent/JPH0730678Y2/ja
Publication of JPH02102462U publication Critical patent/JPH02102462U/ja
Application granted granted Critical
Publication of JPH0730678Y2 publication Critical patent/JPH0730678Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1010689U 1989-01-31 1989-01-31 真空蒸着装置 Expired - Lifetime JPH0730678Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1010689U JPH0730678Y2 (ja) 1989-01-31 1989-01-31 真空蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1010689U JPH0730678Y2 (ja) 1989-01-31 1989-01-31 真空蒸着装置

Publications (2)

Publication Number Publication Date
JPH02102462U true JPH02102462U (enrdf_load_stackoverflow) 1990-08-15
JPH0730678Y2 JPH0730678Y2 (ja) 1995-07-12

Family

ID=31217470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1010689U Expired - Lifetime JPH0730678Y2 (ja) 1989-01-31 1989-01-31 真空蒸着装置

Country Status (1)

Country Link
JP (1) JPH0730678Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0730678Y2 (ja) 1995-07-12

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