JPH02102459U - - Google Patents
Info
- Publication number
- JPH02102459U JPH02102459U JP761089U JP761089U JPH02102459U JP H02102459 U JPH02102459 U JP H02102459U JP 761089 U JP761089 U JP 761089U JP 761089 U JP761089 U JP 761089U JP H02102459 U JPH02102459 U JP H02102459U
- Authority
- JP
- Japan
- Prior art keywords
- window frame
- lattice
- window
- thin film
- large number
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 230000002265 prevention Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Description
図面は本考案の実施例を示すもので、第１図は
防着板の断面図、第２図は背面図、第３図、第４
図はＥＬデバイスの絶縁膜形成装置の応用例であ
るインライン型スパツタ装置を概略的に示すもの
で、第３図はその平面図、第４図は断面図である
。 １は窓枠部材、１ａは窓枠、２は防着片。
防着板の断面図、第２図は背面図、第３図、第４
図はＥＬデバイスの絶縁膜形成装置の応用例であ
るインライン型スパツタ装置を概略的に示すもの
で、第３図はその平面図、第４図は断面図である
。 １は窓枠部材、１ａは窓枠、２は防着片。
Claims (1)
- 格子状の窓枠１ａを多数個有する窓枠部材１の
各窓枠１ａの表側の下側辺に、各窓枠１ａに対応
する大きさの防着片２を上側へ向けて傾斜して取
付けたことを特徴とする薄膜半導体形成装置の防
着板。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP761089U JPH02102459U (ja) | 1989-01-27 | 1989-01-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP761089U JPH02102459U (ja) | 1989-01-27 | 1989-01-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02102459U true JPH02102459U (ja) | 1990-08-15 |
Family
ID=31212765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP761089U Pending JPH02102459U (ja) | 1989-01-27 | 1989-01-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02102459U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014055342A (ja) * | 2012-09-14 | 2014-03-27 | Hitachi High-Technologies Corp | 成膜装置 |
-
1989
- 1989-01-27 JP JP761089U patent/JPH02102459U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014055342A (ja) * | 2012-09-14 | 2014-03-27 | Hitachi High-Technologies Corp | 成膜装置 |
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