JPH0210224B2 - - Google Patents
Info
- Publication number
- JPH0210224B2 JPH0210224B2 JP56126503A JP12650381A JPH0210224B2 JP H0210224 B2 JPH0210224 B2 JP H0210224B2 JP 56126503 A JP56126503 A JP 56126503A JP 12650381 A JP12650381 A JP 12650381A JP H0210224 B2 JPH0210224 B2 JP H0210224B2
- Authority
- JP
- Japan
- Prior art keywords
- heating tube
- metal
- linear body
- plating
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052751 metal Inorganic materials 0.000 claims description 37
- 239000002184 metal Substances 0.000 claims description 37
- 238000010438 heat treatment Methods 0.000 claims description 34
- 238000007747 plating Methods 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 230000008018 melting Effects 0.000 claims description 4
- 238000002844 melting Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 239000013307 optical fiber Substances 0.000 description 6
- 239000011810 insulating material Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
Description
【発明の詳細な説明】
本発明は、真空蒸着による線状体の金属メツキ
方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of metal plating a linear body by vacuum deposition.
光フアイバに金属メツキを施す手段として、
）電気メツキ（無電解メツキ、電解メツキ）、
）デイツピング、）真空メツキ等が有力であ
るが、夫々は次のような欠点を有している。 As a means of applying metal plating to optical fibers,
) Electroplating (electroless plating, electrolytic plating),
) dipping, ) vacuum plating, etc. are promising, but each has the following drawbacks.
即ち、）においては、光フアイバが水分にさ
らされるので伝送ロスが増す、）においては被
覆膜が偏肉し、ひび割れが生ずる、そして）の
場合、膜厚が充分な厚さにならず、従つてメツキ
速度を上げることができず、また蒸発金属の歩留
りが悪い。 That is, in case of ), the optical fiber is exposed to moisture, which increases transmission loss, in case of ), the coating film becomes uneven in thickness and cracks occur, and in case of ), the film thickness is not sufficient. Therefore, the plating speed cannot be increased, and the yield of evaporated metal is poor.
上記）及び）の欠点は本質的な問題であ
り、現段階での技術的解決は困難と思われる。 The drawbacks of () and () above are essential problems, and it seems difficult to solve them technically at this stage.
この点、）における欠点は、本質的なもので
はなく、技術的に解決可能であり、従つて本発明
は上記３つの手段の中、最後の）を対象とする
ものである。 The drawback in this point) is not essential and can be solved technically, and therefore, the present invention is directed to the last of the above three measures.
ところで、真空メツキは一般に、るつぼ内の金
属を蒸発させ、この蒸発金属を線状体等に付着さ
せるのであるが、上記）の欠点は、るつぼ内の
金属を蒸発させる、という点に根ざしている。 By the way, vacuum plating generally evaporates the metal in the crucible and attaches this evaporated metal to a linear object, etc., but the drawback of the above) is that it evaporates the metal in the crucible. .
即ち、かかる方法においては、るつぼからの蒸
発金属を線状体上に絞ることは難しく、換言すれ
ば、蒸発金属を線状体上に集中させることは難し
く、このため、蒸発金属の無駄が多く、歩留りが
悪かつた。 That is, in such a method, it is difficult to squeeze the evaporated metal from the crucible onto the linear body, in other words, it is difficult to concentrate the evaporated metal on the linear body, and for this reason, there is a lot of waste of evaporated metal. , the yield was poor.
特に線状体が、直径125μｍという細い光フア
イバの場合には、上記とあいまつてさらに欠点が
助長されることになつていた。 In particular, when the linear body is a thin optical fiber with a diameter of 125 μm, the above-mentioned drawbacks are exacerbated.
本発明は、真空容器の内部に加熱管を設け、該
加熱管の周囲から金属を送入可能にしておき、該
加熱管の温度を上記金属の融点以上に設定し、同
加熱管の内部に線状体を走行させるようにするこ
とによつて、上記問題点を解決しようというもの
で、これを図面に示す実施例を参照しながら説明
すると、第１図に示すように、周壁１に送入孔
２，２，２…が形成された加熱管３を真空容器
３′内に設置する。 The present invention provides a heating tube inside a vacuum container, allows metal to be introduced from around the heating tube, sets the temperature of the heating tube to a temperature higher than the melting point of the metal, and The above-mentioned problem is solved by making the linear body travel.This will be explained with reference to the embodiment shown in the drawings.As shown in FIG. A heating tube 3 with inlet holes 2, 2, 2, . . . formed therein is installed in a vacuum container 3'.
上記加熱管３の外周に、同加熱管３を加熱する
ための発熱体４を設け、さらにその外周に熱効率
を良くするための断熱材５を配置する。 A heating element 4 for heating the heating tube 3 is provided on the outer periphery of the heating tube 3, and a heat insulating material 5 is further placed on the outer periphery for improving thermal efficiency.
この断熱材５にも、加熱管３の送入孔２，２，
２…の位置に対応して、孔６，６，６…が形成さ
れており、これらの孔２，２，２…、６，６，６
…には、第２図に示すように、外側に断熱材７を
有するガイド管８が、加熱管３とその外周の断熱
材５とを渡架するように、嵌合されている。 This heat insulating material 5 also has inlet holes 2, 2,
Holes 6, 6, 6... are formed corresponding to the positions of 2..., and these holes 2, 2, 2..., 6, 6, 6
As shown in FIG. 2, a guide tube 8 having a heat insulating material 7 on the outside is fitted so as to bridge the heating tube 3 and the heat insulating material 5 on its outer periphery.
このガイド管８から、金属線等の金属９が送入
されるのであるが、同ガイド管８の存在により、
金属９は加熱管３の内周面でのみ蒸発または溶融
し、加熱管３の外周面で蒸発、溶融することはな
く、たとえそこで蒸発、溶融しても、加熱管３と
その外周の断熱材５との間隙に漏れることなく、
従つて金属の無駄がなくなる。 A metal 9 such as a metal wire is fed through this guide tube 8, and due to the existence of the guide tube 8,
The metal 9 evaporates or melts only on the inner circumferential surface of the heating tube 3, and does not evaporate or melt on the outer circumferential surface of the heating tube 3. Even if it evaporates or melts there, it will not evaporate or melt on the heating tube 3 and the heat insulating material around its outer circumference. without leaking into the gap between 5 and 5.
Therefore, there is no waste of metal.
金属９の送入される速さは、同金属の蒸発また
は加熱管３の内周面沿いに拡散する早さに応じて
制御される。 The speed at which the metal 9 is fed is controlled depending on the speed at which the metal evaporates or diffuses along the inner peripheral surface of the heating tube 3.
金属９の数には、特に制限はなく、必要とされ
るメツキの厚さに応じて適宜選ばれる。 The number of metals 9 is not particularly limited and is appropriately selected depending on the required plating thickness.
メツキすべき線状体１０は、加熱管３内部のほ
ぼ中央部を走行するよう設定される。 The linear body 10 to be plated is set to run approximately in the center of the heating tube 3.
上記構成において、加熱管３の温度を金属９の
融点以上に設定し、金属９をある速度で送入する
と、加熱管３の内周面に達した金属９の先端は、
加熱管３によつて加熱され、第２図及び第３図に
示すように、蒸発金属１１となりあるいは加熱管
３の内周面沿いに拡散する溶融金属１２となる。 In the above configuration, when the temperature of the heating tube 3 is set above the melting point of the metal 9 and the metal 9 is fed at a certain speed, the tip of the metal 9 that has reached the inner peripheral surface of the heating tube 3 is
It is heated by the heating tube 3, and becomes an evaporated metal 11 or a molten metal 12 that diffuses along the inner peripheral surface of the heating tube 3, as shown in FIGS. 2 and 3.
かかる状態で、線状体１０を走行させると、上
記蒸発金属１１と、拡散中の溶融金属１２が蒸発
した蒸発金属１１′が、線状体１０に付着する。 When the linear body 10 is run in this state, the evaporated metal 11 and the evaporated metal 11' obtained by evaporating the molten metal 12 during diffusion adhere to the linear body 10.
ここでより具体的な例について述べると、
） 真空容器３′内の圧力を10-5〜10-6torrと
し、金属９としてニツケルを用いた。 Here, a more specific example will be described: ) The pressure inside the vacuum vessel 3' was set to 10 -5 to 10 -6 torr, and nickel was used as the metal 9.
加熱管３の材質は窒化ケイ素系のセラミツク
とし、その内面温度を約1500℃に設定した。 The material of the heating tube 3 was silicon nitride ceramic, and its inner surface temperature was set at about 1500°C.
加熱管３の寸法は、内径20mm、高さ300mmと
し、ニツケルは、加熱管３の内周面上で相互に
均等の距離を有するよう６箇所に送入した。 The heating tube 3 had an inner diameter of 20 mm and a height of 300 mm, and the nickel was fed into six locations on the inner peripheral surface of the heating tube 3 at equal distances from each other.
） 線状体１０として、ナイロン被覆が施され
た光フアイバに、アルミニウムを被覆厚数百オ
ングストロームで被覆させるために本装置を用
いた。) This apparatus was used to coat a nylon-coated optical fiber with aluminum to a coating thickness of several hundred angstroms as the linear body 10.
光フアイバの線速を数拾ｍ／分とし、加熱管
３の温度を約900℃に設定した。 The linear speed of the optical fiber was set to several meters per minute, and the temperature of the heating tube 3 was set to about 900°C.
真空容器３′内の圧力を10-4〜10-5torrとし、
加熱管３上方には、光フアイバを取り囲む図示
しない高周波電極を設置し、13.56MHzで放電
させた。 The pressure inside the vacuum container 3' is set to 10 -4 to 10 -5 torr,
A high frequency electrode (not shown) surrounding the optical fiber was installed above the heating tube 3, and discharged at 13.56 MHz.
この放電により付着力が大なるアルミニウム
メツキが得られた。 This discharge resulted in aluminum plating with high adhesion.
以上のように、本発明においては、真空容器の
内部に加熱管を設け、該加熱管の周囲から金属を
同管内部に送入可能にしておき、該加熱管の温度
を上記金属の融点以上に設定し、同加熱管の内部
に線状体を走行させるようにしたので、蒸発金属
を加熱管によつて絞ることが可能になり、線状体
の線速を上げることができるようになつた。 As described above, in the present invention, a heating tube is provided inside a vacuum container, metal can be fed into the tube from around the heating tube, and the temperature of the heating tube is set to be higher than the melting point of the metal. , and the linear object was run inside the heating tube, making it possible to squeeze the evaporated metal through the heating tube and increasing the linear speed of the linear object. Ta.
また蒸発金属が線状体の半径方向から飛散して
くるので、均一な厚さの被覆が得られる。 Furthermore, since the evaporated metal scatters from the radial direction of the linear body, a coating with a uniform thickness can be obtained.
第１図は本発明に係る装置の一部を示す断面
図、第２図は同装置の要部拡大断面図、第３図は
第１図におけるＡ−Ａ断面図である。
３…加熱管、３′…真空容器、１０…線状体、
１１，１１′…蒸発金属。
FIG. 1 is a sectional view showing a part of the device according to the present invention, FIG. 2 is an enlarged sectional view of the main part of the device, and FIG. 3 is a sectional view taken along line A-A in FIG. 3... Heating tube, 3'... Vacuum container, 10... Linear body,
11,11'...evaporated metal.
Claims (1)
周囲から金属を該管内部に送入可能にしておき、
該加熱管の温度を上記金属の融点以上に設定し、
該加熱管の内部に線状体を走行させるようにした
ことを特徴とする線状体の金属メツキ方法。 ２ 加熱管の周壁に送入孔を設け、該送入孔から
金属線を送入するようにしたことを特徴とする特
許請求の範囲第１項記載の線状体の金属メツキ方
法。[Claims] 1. A heating tube is provided inside the vacuum container, and metal can be fed into the tube from around the heating tube,
Setting the temperature of the heating tube above the melting point of the metal,
A method for metal plating a linear body, characterized in that the linear body is run inside the heating tube. 2. A method of metal plating a linear body according to claim 1, characterized in that a feed hole is provided in the peripheral wall of the heating tube, and the metal wire is fed through the feed hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56126503A JPS5827978A (en) | 1981-08-12 | 1981-08-12 | Metal plating method on wire-like body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56126503A JPS5827978A (en) | 1981-08-12 | 1981-08-12 | Metal plating method on wire-like body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5827978A JPS5827978A (en) | 1983-02-18 |
| JPH0210224B2 true JPH0210224B2 (en) | 1990-03-07 |
Family
ID=14936814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56126503A Granted JPS5827978A (en) | 1981-08-12 | 1981-08-12 | Metal plating method on wire-like body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5827978A (en) |
-
1981
- 1981-08-12 JP JP56126503A patent/JPS5827978A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5827978A (en) | 1983-02-18 |
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