JPH0198167U - - Google Patents
Info
- Publication number
- JPH0198167U JPH0198167U JP19377087U JP19377087U JPH0198167U JP H0198167 U JPH0198167 U JP H0198167U JP 19377087 U JP19377087 U JP 19377087U JP 19377087 U JP19377087 U JP 19377087U JP H0198167 U JPH0198167 U JP H0198167U
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- raw material
- retort
- thin film
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims 4
- 238000006243 chemical reaction Methods 0.000 claims 2
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19377087U JPH0198167U (sv) | 1987-12-21 | 1987-12-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19377087U JPH0198167U (sv) | 1987-12-21 | 1987-12-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0198167U true JPH0198167U (sv) | 1989-06-30 |
Family
ID=31484545
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19377087U Pending JPH0198167U (sv) | 1987-12-21 | 1987-12-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0198167U (sv) |
-
1987
- 1987-12-21 JP JP19377087U patent/JPH0198167U/ja active Pending