JPH0198166U - - Google Patents

Info

Publication number
JPH0198166U
JPH0198166U JP1987193395U JP19339587U JPH0198166U JP H0198166 U JPH0198166 U JP H0198166U JP 1987193395 U JP1987193395 U JP 1987193395U JP 19339587 U JP19339587 U JP 19339587U JP H0198166 U JPH0198166 U JP H0198166U
Authority
JP
Japan
Prior art keywords
electrode
processing apparatus
plasma processing
insulating surface
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987193395U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987193395U priority Critical patent/JPH0198166U/ja
Priority to US07/214,179 priority patent/US4968918A/en
Priority to DE3887933T priority patent/DE3887933T2/de
Priority to EP88110707A priority patent/EP0298420B1/en
Priority to KR1019880008345A priority patent/KR950001541B1/ko
Publication of JPH0198166U publication Critical patent/JPH0198166U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
JP1987193395U 1987-07-06 1987-12-22 Pending JPH0198166U (cs)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP1987193395U JPH0198166U (cs) 1987-12-22 1987-12-22
US07/214,179 US4968918A (en) 1987-07-06 1988-07-01 Apparatus for plasma treatment
DE3887933T DE3887933T2 (de) 1987-07-06 1988-07-05 Plasma-Bearbeitungsgerät.
EP88110707A EP0298420B1 (en) 1987-07-06 1988-07-05 Apparatus for plasma treatment
KR1019880008345A KR950001541B1 (ko) 1987-07-06 1988-07-06 플라즈마처리용 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987193395U JPH0198166U (cs) 1987-12-22 1987-12-22

Publications (1)

Publication Number Publication Date
JPH0198166U true JPH0198166U (cs) 1989-06-30

Family

ID=31484183

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987193395U Pending JPH0198166U (cs) 1987-07-06 1987-12-22

Country Status (1)

Country Link
JP (1) JPH0198166U (cs)

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