JPH0197546U - - Google Patents
Info
- Publication number
- JPH0197546U JPH0197546U JP19431787U JP19431787U JPH0197546U JP H0197546 U JPH0197546 U JP H0197546U JP 19431787 U JP19431787 U JP 19431787U JP 19431787 U JP19431787 U JP 19431787U JP H0197546 U JPH0197546 U JP H0197546U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- vapor phase
- holding jig
- phase growth
- wafer holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19431787U JPH0197546U (ko) | 1987-12-21 | 1987-12-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19431787U JPH0197546U (ko) | 1987-12-21 | 1987-12-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0197546U true JPH0197546U (ko) | 1989-06-29 |
Family
ID=31485049
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19431787U Pending JPH0197546U (ko) | 1987-12-21 | 1987-12-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0197546U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09219438A (ja) * | 1996-02-09 | 1997-08-19 | Tera Tec:Kk | サンプル支持用治具 |
-
1987
- 1987-12-21 JP JP19431787U patent/JPH0197546U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09219438A (ja) * | 1996-02-09 | 1997-08-19 | Tera Tec:Kk | サンプル支持用治具 |