JPH0196909A - Saturable inductor and manufacture thereof and pulse laser exciting power source device using saturable inductor - Google Patents

Abstract

PURPOSE:To improve magnetic characteristics and make a pulse laser exciting power source device have excellent performance and reduce the cost as well, by treating an amorphous metal with heat in such a way that flexibility to perform winding can be still held by the amorphous metal, even though its brittleness gets worse to a certain extent and after that, winding the amorphous metal by laminating materials on the metal. CONSTITUTION:An amorphous metal is treated with heat in such a way the crack and the like does not develop in the amorphous metal when winding is performed in a state that thin films made of polyester are laminated on the amorphous metal. 4 high electric potential conductor plate is placed at a center and is interposed between two sheets of earth conductor plates 3a and 3b so as to realize stability and low inductance to high voltage. Respective capacitors C1-C3, for example, are composed by connecting in parallel a plurality of ceramic capacitors and the like having low residual inductance respectively. In this way, a plurality of energy oscillation shifting circuits are connected in series and a magnetic pulse compression equipment can be composed by using saturable inductor as an inductor in the circuit and by unifying electrostatic capacity of the capacitors C1-C3 and further, by making saturated inductance of the saturable inductor decrease gradually.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a saturable inductor, and particularly to one that is connected in series after a step-up transformer. The present invention also relates to a pulsed laser excitation power supply device using this saturable inductor.

[Conventional technology]

As a saturable inductor used in a pulsed laser excitation power supply device or the like, one in which an insulating material is layered and wound around a band-shaped amorphous metal is known.

The reason for using amorphous metal is that it has the characteristics of low iron loss, high saturation magnetic flux density, and high angularity (high magnetic permeability), making it possible to miniaturize and improve the performance of inductors. .

However, in general, the magnetic properties of amorphous magnetic materials are significantly deteriorated due to the strain that occurs during rapid cooling during manufacturing or during processing. It is necessary to perform a heat treatment to remove distortion at a temperature near that temperature. This heat treatment is related to temperature and time, and for example, in the case of Allied Signal's amorphous magnetic alloy (trade name: Metoglas), the temperature is in the range of 300 to 500°C.
In particular, Metglas 260552 type amorphous metal (hereinafter simply referred to as S2 type) has a temperature of approximately 400°C.
60SSC type amorphous metal (hereinafter simply referred to as SC type) requires a temperature of about 365°C.

By the way, when such heat treatment is applied, the amorphous metal becomes brittle and becomes more likely to break.

Therefore, when manufacturing a saturable inductor using an amorphous metal as a wound core, it is difficult to heat-treat the amorphous metal in advance near the Curie temperature and then wrap the insulating material again.

For this reason, in the past, it was necessary to manufacture a non-heat-treated amorphous metal band by overlapping and winding an insulating material and then subjecting it to heat treatment under the above conditions.

As a result, heat is applied to the insulation material during heat treatment, so a material with excellent heat resistance is required. ”) is being used to deal with this issue.

[Problem that the invention seeks to solve]

However, the above-described manufacturing method has a problem in that desired magnetic properties cannot be sufficiently obtained due to distortion caused by the difference in thermal expansion between the band-shaped amorphous metal and the polyimide sheet during heat treatment. In particular, the squareness in the B-H characteristic is not sufficiently improved, and the saturation magnetic flux density ΔB cannot be obtained at the desired value, making it impossible to obtain a small, high-performance saturable inductance.

Furthermore, the above-mentioned polyimide is extremely expensive, and there is also the problem that the cost of the saturable inductance using it is high.

The present invention has been made in view of these problems, and provides a saturable inductor and a saturable inductor that have excellent magnetic properties and can be constructed using an inexpensive insulating material with low heat resistance, thereby reducing costs. The technical object of the present invention is to provide a method for manufacturing the saturable inductor, and also to provide a pulse laser excitation power supply device using this saturable inductor.

[Means for solving problems]

As mentioned above, it is said that sufficient magnetic properties cannot be obtained from amorphous metals unless they are heat-treated to remove strain at a temperature below the crystallization temperature and near the Curie temperature.
As a result of experiments, it has been found that excellent magnetic properties can be obtained even when heat treatment is performed at a temperature lower than the above-mentioned temperature.

Furthermore, it has become clear that embrittlement does not progress much when heat treated at a relatively low temperature.

The present invention focuses on the physical properties of such amorphous metal, and a saturable inductor was manufactured by the following method.

That is, the method of the present invention heat-treats the amorphous metal within a range that allows it to still maintain the flexibility to be wound even if its brittleness progresses, and then overlays the insulating material on the heat-treated amorphous metal. This is a method of manufacturing a saturable inductor by winding the inductor.

Here, an amorphous metal having a predetermined length and a thickness t is curved, and the outer diameter of the curved amorphous metal just before it is destroyed by this curving is L, and the radius of curvature is r (r - (L-t) /2), the apparent degree of embrittlement (ξf) expressed by the following formula (%) is 0.025 or more,
Preferably 0.03 or more, more preferably 0.035
It was confirmed that when the heat treatment is performed under the above conditions, the amorphous metal remains within a range where it can still maintain flexibility to allow winding, even if its layered property progresses. .

Specific conditions for heat treatment include, for example, 250°C to 45°C.
An example of this is heat treatment at 0°C, preferably 3008C to 350°C, for up to 2 hours.

Moreover, when the heat treatment is performed in a magnetic field, the magnetic properties of the amorphous metal are further improved.

The amorphous metal has a composition such as Fe-B
-6i-C system, Fe-C0/B-8i system, Fe-B-8
i series, Fe-B4Si-Cr series, Fe-N1-Mo-B
system, CO/Fe-Ni -MO/B-8i system, co-F
Examples include those based on e-Ni-B-8i.

The pulse laser excitation power supply device includes a step-up transformer T
I, a pulse switch means SW1 for intermittently connecting a power supply to the step-up transformer T1, and a saturable inductor SLI connected in series to the output of the step-up transformer, respectively.
SL2, SL3 and energy storage capacitors C2, C3,
C4, and the saturable inductor is heat-treated within a range that can still maintain the flexibility to be wound even if brittleness progresses, and then the heat-treated amorphous inductor is It is constructed by layering and winding insulating material around metal.

[Effect]

The greatest feature of the present invention is that the amorphous metal is not heat-treated while being wound into a coil, but within a range where the amorphous metal alone can still maintain the flexibility to be wound even if its brittleness progresses. After heat treatment, the insulation material is layered and wound.

Therefore, when selecting an insulating material, there is no need to consider heat resistance as in the conventional case, and paper, rubber, etc. can be used in addition to synthetic resin. Synthetic resins include polyolefins such as polyethylene, polypropylene, polymethylbutene, and polymethylpentene, polyesters such as polyethylene terephthalate and polybutene terephthalate, polyamides such as nylon 6, nylon 11, and nylon 12, polyvinyl chloride, ABS, and various other synthetic resins. Resin can be used. Specifically, it is preferable to select the material in accordance with the performance required of the saturable inductor, taking into consideration the dielectric constant, insulation resistance, weather resistance, etc. Also, what is important here is that the range of choices for insulating materials has expanded, making it possible to use inexpensive insulating materials.

In addition, in the present invention, unlike conventional methods, the amorphous metal is not heat-treated while being wound into a coil, so during the heat treatment, the desired magnetic There is no problem of not being able to obtain sufficient characteristics. This improves the squareness (magnetic permeability) of amorphous metals, especially the B-H characteristics.
can be improved.

〔Example〕

Embodiments of the present invention will be described based on FIGS. 1 to 8.

In this example, the band-shaped amorphous metal serving as the winding core is
After heat-treating the metal within a range that allows it to remain flexible enough to be wound even if its brittleness progresses, a polyester thin film is layered on the heat-treated amorphous metal as an insulating material and wound.

The problem here lies in heat-treating the amorphous metal to such an extent that no cracks or the like occur in the amorphous metal when the polyester thin film is superimposed on the amorphous metal and wound.

The apparent degree of brittleness is determined by holding both ends of a plate-shaped amorphous metal sample of a predetermined length between the arms of a compression testing machine, bringing the arms close together, and bending the sample, as shown in Figure 2. Measured by.

At this time, if the thickness of the sample is t1 the radius of curvature is rl and the outer diameter (distance between both arms) of the curved amorphous metal just before it is destroyed by this curvature is L, then the apparent degree of brittleness (ξf) is: ξf = t/(L-t).

In addition, the radius of curvature (r) at the time of destruction is r=(L-t)/2 It is indicated by.

Below, the results of an experiment in which an amorphous metal sample was heat treated will be explained.

<Example 1> Figure 1 shows how Metglas 26 was heated by changing the heating temperature and heating time.
This is a plot of the change in brittleness (ξf) of 05S2 (S2 type) amorphous metal, which was heat treated for 10 minutes by changing the heating temperature appropriately, or heated for 2 hours at 260°C for 300'. l: Measured by heating for 2 hours, heating at 300''CI for 4 hours, heating at 315°C for 2 hours, and heating at 315°C for 6 hours.

As a result, heating at 260℃ for 2 hours, heating at 300℃ for 2 hours,
Heating at 300°C for 14 hours / Heating at 315°C for 2 hours / 3
It was confirmed that all the products heated at 1'5°C for 6 hours retained flexibility to allow winding.

Subsequently, an experiment was conducted to examine the relationship between heating temperature and magnetic properties, and the results shown in FIGS. 3(A) to 3(C) were obtained. In the figure, the vertical axis shows the magnetic flux density (Gauss), and the horizontal axis shows the magnetic field (Oersted).
shows.

As a reference example, S2 type amorphous metal was not heat treated,
A 6 μm polyester sheet was inserted into this and wound into 800 layers, and measurements were further carried out in a magnetic field of 20 oersteds.

The experimental results are shown in FIG. 3(A).

Although this characteristic functions as a saturable inductor, it is still insufficient, and it is necessary to improve the performance in order to further reduce the size and increase efficiency.

Next, the S2 type amorphous metal was heated at 315°C for 2 hours.
After heat treatment in an atmosphere of N in a 00e magnetic field, measurements showed that magnetic properties with improved performance required for a saturable inductor were obtained. The experimental results are shown in FIG. 3(B).

After heat-treating the 82-type amorphous metal under the conditions shown in FIG. 3(B), a 6μ polyester sheet was inserted into the S2-type amorphous metal to give a width of 2.54 cm.
Wound in 800 layers with an inner diameter of 4 am and an outer diameter of 8.97 cm.
When measured, excellent magnetic properties were obtained.

The experimental results are shown in FIG. 3(C).

<Example 2> An experiment was conducted to examine the relationship between the heating temperature and heating time and magnetic properties of 26053C (hereinafter abbreviated as SC type) amorphous metal, and the results shown in FIGS. 3(D) to 3(G) were obtained.

As a reference example, SC type amorphous metal is not heat treated,
A polyester sheet was interposed therebetween and wound into 800 layers, and further measurements were taken in a magnetic field of 20 oersteds. The experimental results are shown in FIG. 3(D). Although this characteristic functions as a saturable inductor, it is still insufficient, and further miniaturization and
It is necessary to improve performance in order to increase efficiency.

Next, the SC type amorphous metal was heat treated at 300'C for 2 hours in an N1 atmosphere in a 200e magnetic field, and measured in a 20 Oe magnetic field. Magnetic properties were obtained. The experimental results are shown in FIG. 3(E).

SC type amorphous metal was heat treated at 315°C for 2 hours in a 200e magnetic field with N atmosphere and measured, and it was found that magnetic properties even better than those shown in Figure 3 (E) were obtained. Ta. The experimental results are shown in FIG. 3(F).

The SC type amorphous metal was heat treated under the conditions shown in FIG. 3(F) above, and a 6 μm polyester sheet was inserted into the SC type amorphous metal to form a sheet with a width of 2.54 cm and an inner diameter of 4 cm.
tn, outer diameter 8.33 cm, and wound in 800 layers, sufficient magnetic properties required for a saturable inductor were obtained. The experimental results are shown in Figure 3 (G).

As described above, from the first and second examples, it has become clear that heating at 300° C. for 2 hours or less hardly causes embrittlement, while the magnetic properties are considerably improved and can withstand practical use.

In this way, the amorphous metal heat-treated at 300° C. to 315° C. for 2 hours or less is layered on a polyester sheet and wound into a coil to form a saturable inductor.

Unlike conventional insulation materials, heat resistance is not required for insulation material 2, so any sheet material other than the polyester sheet used in the example can be used as long as the electrical properties and weather resistance meet the conditions. can do.

FIG. 4 shows the electrical configuration of a high-speed repetitive pulse laser excitation power supply device using the saturable inductor having the above configuration. The device in the figure is a charging power supply PS.

A semiconductor switch element SW1, such as SCH, connected to the charging power supply PS, an energy storage capacitor C! , a step-up transformer TI in which a primary coil is connected to both ends of a semiconductor switch element SW via a capacitor CI;
A saturable inductor SL cascaded to the secondary coil of I
I, SL2. It consists of SL3 and capacitors CI, C2, and C3, and a laser load LD such as a maximer laser is connected to it. FIG. 5 shows a specific configuration of the pulse compression circuit used in the device shown in FIG. As shown in Fig. 5, the pulse compression circuit places a high potential conductor plate in the center and connects it to two ground conductor plates 3a, 3 in order to achieve stability against high voltage and low inductance.
It has a structure in which it is sandwiched by b. Each capacitor C
1, C2, and C3 are each constructed by connecting in parallel a plurality of ceramic capacitors each having a small residual inductance, for example.

Note that, for example, an oil capacitor or the like can be used as the energy storage capacitor CI connected to the primary coil side of the step-up transformer TI. Each saturable inductor SLI, SL
2. SL3 has cooling fans 5a,
5b and 5c are provided respectively. It goes without saying that the saturable inductors SLI, SL2, and SLa may be liquid-cooled.

Each of the saturable inductors SLI, SL2 . SL3 is manufactured by the method described above, and by using the desired number of each of the magnetic cores described above and appropriately selecting the number of turns of the coil, the inductance at saturation can be reduced to 5L.
For example, the configuration is such that sat becomes smaller sequentially.

The operation of the high-speed repetitive pulse laser excitation power supply device configured as described above will be explained. First, the energy storage capacitor C1 is set to V cl (voltage) using the high voltage charging power supply PS.
By charging the semiconductor switch SW and triggering the gate of the semiconductor switch SW from the outside, the semiconductor switch SW is made conductive. As a result, the charge on the capacitor Ct is transferred to the capacitor C2 via the step-up transformer TI.

Here, the saturable inductor SLI is in an unsaturated state during this period and has a high inductance, so that almost no charge in the capacitor C2 is drained to the capacitor C3. On the other hand, when the voltage of capacitor C2 reaches VC2max, saturable inductor SL! is designed so that it reaches a saturated state and the inductance drops rapidly. As a result, the charge accumulated in the capacitor C2 does not return to the capacitor Ct, and the charge accumulated in the capacitor C2 and the saturable inductor S
The voltage is transferred to the capacitor C3 according to the time constant τ1 of the circuit constituted by L1 and the capacitor C3, and the voltage of the capacitor C3 reaches the maximum voltage V C3max after 11 hours have elapsed. At this time, the time constant τ1 is expressed by the following formula % Formula % Here, S L l5at is the saturation inductance of the saturable inductor SLI. Time constant τ1 expressed by the above formula
During the time period, saturable inductor SL2 is in an unsaturated state, and the charge stored in capacitor C2 is transferred to capacitor C4.
Instead of flowing into the capacitor C3, most of it is transferred to the capacitor C3. Then, when the voltage of capacitor C3 reaches vc3max, saturable inductor SL2 suddenly becomes saturated, but by making the saturable inductance of saturable inductor SL2 smaller than that of saturable inductor SLI, capacitor C3 , saturable inductor SL2, and capacitor C4, the energy stored in capacitor C3 can be effectively transferred to capacitor C4, and the pulse width can be compressed.

In this case, the time constant τ2 is expressed by the following equation.

τ2=π−r [5L2satx (C3x C4)/
(Ca+C4)] Here, S L 2sat is the saturation inductance of the saturable inductor SL2.

Similarly, the charge on capacitor C3 is completely reduced to capacitor C4.
The saturable inductor SL3 remains in an unsaturated state until the energy is transferred to Load LD
flows into.

Note that the output impedance Z out of the power supply device is Z
out = 2 ff (S L 3sat/C4), and by considering the shape of the saturable inductor SL3, its saturation inductance 5L3sat is expressed as the number 10.
Since the output impedance Zout can be made as small as nH, it is possible to make the output impedance Zout 1Ω or less.

In this way, multiple energy resonant transfer circuits are connected in series, a saturable inductor is used as the inductor in the circuit, the capacitances of capacitors CI, C2, and C3 are made the same, and the saturated inductance of the saturable inductor is By gradually decreasing , it becomes possible to construct a magnetic pulse compression device, which allows efficient energy transmission, lowers impedance, and compresses pulse width. Furthermore, the output impedance of the pulsed power source can be matched to the low discharge impedance of the excimer laser.

FIGS. 6 and 7 show other configuration examples of the high-speed repetitive pulse laser excitation power supply device. What is shown in FIG. 6 is a magnetic assist circuit. It uses a Thyratron SW as a pulse switch,
A saturable inductor SL is used to protect the thyratron SW by extending its life.

The circuit shown in FIG. 7 includes a saturable inductor SL as a magnetic output switch (pulse sharpening switch). As this impedance circuit Z, a capacitor or a pulse shaping circuit (pulse shaping line) can be used.

〔Effect of the invention〕

In the present invention, the amorphous metal is heat-treated within a range that allows it to still maintain the flexibility to be wound even if its brittleness progresses, and then the insulating material is layered and wound. Unlike heat treatment in which metal is wound into a coil, there is no problem that the desired magnetic properties cannot be obtained due to distortion caused by the difference in thermal expansion between the amorphous metal and the insulating material during heat treatment. Accordingly, it is possible to improve the magnetic properties of the amorphous metal, especially the squareness (magnetic permeability) in the B-H properties.

Furthermore, when selecting an insulating material, it is not necessary to consider heat resistance as in the conventional case, and therefore, an inexpensive insulating material such as polyester can be used, and the cost of the inductor can be reduced.

Therefore, a pulse laser excitation power supply device using this saturable inductor can also have high performance and low cost.

[Brief explanation of the drawing]

Figures 1 to 8 show examples of the present invention, Figure 1 is a graph showing the relationship between the heating temperature of amorphous metal and the apparent degree of embrittlement, and Figure 2 is a graph showing the relationship between the apparent degree of embrittlement and fracture. 3 (A) to (G) are graphs showing the relationship between heat treatment conditions of amorphous metal and hysteresis curve, and FIG. A circuit diagram of a pulsed laser excitation power supply using a saturable inductor, Fig. 5 is a side view showing the internal structure of a pulse compression circuit used in the pulsed laser excitation power supply, and Fig. 6
7 is a circuit diagram of another pulsed laser excitation power supply bag device, and FIG. 8 is a partially cutaway perspective view showing the internal structure of a saturable inductor. 1... Amorphous metal, 2... Insulating material, TI... Step-up transformer, SLI, SL2. SL3...Saturable inductor, ps
...Charging power supply, CI, C2, C3, C4...Capacitor, LL...
・Bypass inductor, LD...laser load. Fig. 1 260552 brittleness of horse mackerel and salmon % embedding 1 degree (・C) εf-1σ'@295'C Fig. 2 Fig. 3 (A) Fig. 3 (B) Fig. 3 (C) Figure 3 (D) Figure 3 (F) Figure 3 (G) Figure 6 S Figure 7 L s

Claims (5)

[Claims] (1) After heat-treating the amorphous metal to the extent that it can still maintain the flexibility to be wound even if its brittleness progresses, the heat-treated amorphous metal is overlaid with an insulating material and wound. A method for manufacturing a saturable inductor characterized by: (2) In the heat treatment, an amorphous metal having a predetermined length and a thickness t is curved, and L is the outer diameter of the curved amorphous metal just before it is destroyed by this curvature, and the radius of curvature is r = (L- t)/2], the apparent degree of embrittlement (ξf) expressed by the following formula ξf=t/(L-t) is 0.025 or more. A method for manufacturing a saturable inductor according to claim 1. (3) The method for manufacturing a saturable inductor according to claim 1, wherein the heat treatment is performed in a magnetic field. (4) It is characterized in that it has been heat-treated within a range that can still maintain the flexibility to be wound even if brittleness progresses, and then an insulating material is layered and wound around this heat-treated amorphous metal. Saturable inductor. (5) a step-up transformer, a pulse switch means for intermittently connecting a power source to the step-up transformer, a saturable inductor connected in series to the output of the step-up transformer, and an energy source connected in parallel; The saturable inductor is heat-treated within a range that can still maintain flexibility to be wound even if brittleness progresses, and then the heat-treated inductor is A pulsed laser excitation power supply device characterized by being made of an amorphous metal and an insulating material layered and wound.