JPH0196648U - - Google Patents
Info
- Publication number
- JPH0196648U JPH0196648U JP19384887U JP19384887U JPH0196648U JP H0196648 U JPH0196648 U JP H0196648U JP 19384887 U JP19384887 U JP 19384887U JP 19384887 U JP19384887 U JP 19384887U JP H0196648 U JPH0196648 U JP H0196648U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- closed
- chamber
- acceleration
- processing chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 10
- 230000001133 acceleration Effects 0.000 claims 6
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19384887U JPH0196648U (fi) | 1987-12-21 | 1987-12-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19384887U JPH0196648U (fi) | 1987-12-21 | 1987-12-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0196648U true JPH0196648U (fi) | 1989-06-27 |
Family
ID=31484620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19384887U Pending JPH0196648U (fi) | 1987-12-21 | 1987-12-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0196648U (fi) |
-
1987
- 1987-12-21 JP JP19384887U patent/JPH0196648U/ja active Pending