JPH0195740U - - Google Patents
Info
- Publication number
- JPH0195740U JPH0195740U JP19172287U JP19172287U JPH0195740U JP H0195740 U JPH0195740 U JP H0195740U JP 19172287 U JP19172287 U JP 19172287U JP 19172287 U JP19172287 U JP 19172287U JP H0195740 U JPH0195740 U JP H0195740U
- Authority
- JP
- Japan
- Prior art keywords
- opening
- wafer
- suction pad
- transfer arm
- end portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19172287U JPH0195740U (en, 2012) | 1987-12-16 | 1987-12-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19172287U JPH0195740U (en, 2012) | 1987-12-16 | 1987-12-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0195740U true JPH0195740U (en, 2012) | 1989-06-26 |
Family
ID=31482620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19172287U Pending JPH0195740U (en, 2012) | 1987-12-16 | 1987-12-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0195740U (en, 2012) |
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1987
- 1987-12-16 JP JP19172287U patent/JPH0195740U/ja active Pending