JPH0195652U - - Google Patents

Info

Publication number
JPH0195652U
JPH0195652U JP19206087U JP19206087U JPH0195652U JP H0195652 U JPH0195652 U JP H0195652U JP 19206087 U JP19206087 U JP 19206087U JP 19206087 U JP19206087 U JP 19206087U JP H0195652 U JPH0195652 U JP H0195652U
Authority
JP
Japan
Prior art keywords
disk
defect inspection
display device
inspection display
displaying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19206087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19206087U priority Critical patent/JPH0195652U/ja
Publication of JPH0195652U publication Critical patent/JPH0195652U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP19206087U 1987-12-18 1987-12-18 Pending JPH0195652U (oth)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19206087U JPH0195652U (oth) 1987-12-18 1987-12-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19206087U JPH0195652U (oth) 1987-12-18 1987-12-18

Publications (1)

Publication Number Publication Date
JPH0195652U true JPH0195652U (oth) 1989-06-23

Family

ID=31482936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19206087U Pending JPH0195652U (oth) 1987-12-18 1987-12-18

Country Status (1)

Country Link
JP (1) JPH0195652U (oth)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03125945A (ja) * 1989-10-11 1991-05-29 Hitachi Electron Eng Co Ltd ウエハ異物検査装置
JP2008234695A (ja) * 2007-03-16 2008-10-02 Pulstec Industrial Co Ltd 光ディスク検査装置及び光ディスク検査方法
JP2009015922A (ja) * 2007-07-02 2009-01-22 Pulstec Industrial Co Ltd 光ディスク検査装置及び光ディスク検査方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03125945A (ja) * 1989-10-11 1991-05-29 Hitachi Electron Eng Co Ltd ウエハ異物検査装置
JP2008234695A (ja) * 2007-03-16 2008-10-02 Pulstec Industrial Co Ltd 光ディスク検査装置及び光ディスク検査方法
JP2009015922A (ja) * 2007-07-02 2009-01-22 Pulstec Industrial Co Ltd 光ディスク検査装置及び光ディスク検査方法

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