JPH0195637U - - Google Patents
Info
- Publication number
- JPH0195637U JPH0195637U JP19191987U JP19191987U JPH0195637U JP H0195637 U JPH0195637 U JP H0195637U JP 19191987 U JP19191987 U JP 19191987U JP 19191987 U JP19191987 U JP 19191987U JP H0195637 U JPH0195637 U JP H0195637U
- Authority
- JP
- Japan
- Prior art keywords
- thermocouple
- wavy
- mounting structure
- guide tube
- spiral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009529 body temperature measurement Methods 0.000 claims 1
- 239000012212 insulator Substances 0.000 claims 1
- 238000009434 installation Methods 0.000 description 1
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19191987U JPH0195637U (ko) | 1987-12-17 | 1987-12-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19191987U JPH0195637U (ko) | 1987-12-17 | 1987-12-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0195637U true JPH0195637U (ko) | 1989-06-23 |
Family
ID=31482803
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19191987U Pending JPH0195637U (ko) | 1987-12-17 | 1987-12-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0195637U (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010185766A (ja) * | 2009-02-12 | 2010-08-26 | Kobelco Eco-Solutions Co Ltd | 撹拌装置 |
JP2022072048A (ja) * | 2020-10-29 | 2022-05-17 | 株式会社Kokusai Electric | 温度センサ、ヒータユニット、基板処理装置及び半導体装置の製造方法 |
-
1987
- 1987-12-17 JP JP19191987U patent/JPH0195637U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010185766A (ja) * | 2009-02-12 | 2010-08-26 | Kobelco Eco-Solutions Co Ltd | 撹拌装置 |
JP2022072048A (ja) * | 2020-10-29 | 2022-05-17 | 株式会社Kokusai Electric | 温度センサ、ヒータユニット、基板処理装置及び半導体装置の製造方法 |