JPH0192132U - - Google Patents
Info
- Publication number
- JPH0192132U JPH0192132U JP18750487U JP18750487U JPH0192132U JP H0192132 U JPH0192132 U JP H0192132U JP 18750487 U JP18750487 U JP 18750487U JP 18750487 U JP18750487 U JP 18750487U JP H0192132 U JPH0192132 U JP H0192132U
- Authority
- JP
- Japan
- Prior art keywords
- chemical solution
- wet etching
- top surface
- tank
- chemical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001039 wet etching Methods 0.000 claims 2
Landscapes
- Weting (AREA)
Description
第１図は本考案の実施例１を示す斜視図、第２
図は本考案の実施例２を示す斜視図、第３図は従
来例を示す斜視図である。 １……薬液槽、２……超音波発振子、３……超
音波発振器。
図は本考案の実施例２を示す斜視図、第３図は従
来例を示す斜視図である。 １……薬液槽、２……超音波発振子、３……超
音波発振器。
Claims (1)
- ウエツトエツチング装置の薬液槽に、少くとも
薬液最表界面から薬液側へ延在する薬液槽側面の
一部に、薬液最表界面に強い加速振動を発生させ
る超音波発振子を有することを特徴とするウエツ
トエツチング装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18750487U JPH0192132U (ja) | 1987-12-09 | 1987-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18750487U JPH0192132U (ja) | 1987-12-09 | 1987-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0192132U true JPH0192132U (ja) | 1989-06-16 |
Family
ID=31478652
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18750487U Pending JPH0192132U (ja) | 1987-12-09 | 1987-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0192132U (ja) |
-
1987
- 1987-12-09 JP JP18750487U patent/JPH0192132U/ja active Pending