JPH0192129U - - Google Patents
Info
- Publication number
- JPH0192129U JPH0192129U JP18693087U JP18693087U JPH0192129U JP H0192129 U JPH0192129 U JP H0192129U JP 18693087 U JP18693087 U JP 18693087U JP 18693087 U JP18693087 U JP 18693087U JP H0192129 U JPH0192129 U JP H0192129U
- Authority
- JP
- Japan
- Prior art keywords
- coating cup
- photoresist
- coating
- exhaust
- cup
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 8
- 238000000576 coating method Methods 0.000 claims description 8
- 229920002120 photoresistant polymer Polymers 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 2
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18693087U JPH0192129U (nl) | 1987-12-08 | 1987-12-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18693087U JPH0192129U (nl) | 1987-12-08 | 1987-12-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0192129U true JPH0192129U (nl) | 1989-06-16 |
Family
ID=31478125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18693087U Pending JPH0192129U (nl) | 1987-12-08 | 1987-12-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0192129U (nl) |
-
1987
- 1987-12-08 JP JP18693087U patent/JPH0192129U/ja active Pending