JPH0191509U - - Google Patents

Info

Publication number
JPH0191509U
JPH0191509U JP18828487U JP18828487U JPH0191509U JP H0191509 U JPH0191509 U JP H0191509U JP 18828487 U JP18828487 U JP 18828487U JP 18828487 U JP18828487 U JP 18828487U JP H0191509 U JPH0191509 U JP H0191509U
Authority
JP
Japan
Prior art keywords
workpiece
dicing
dicing apparatus
main body
front side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18828487U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0523291Y2 (sh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987188284U priority Critical patent/JPH0523291Y2/ja
Publication of JPH0191509U publication Critical patent/JPH0191509U/ja
Application granted granted Critical
Publication of JPH0523291Y2 publication Critical patent/JPH0523291Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding Of Workpieces (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
JP1987188284U 1987-12-11 1987-12-11 Expired - Lifetime JPH0523291Y2 (sh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987188284U JPH0523291Y2 (sh) 1987-12-11 1987-12-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987188284U JPH0523291Y2 (sh) 1987-12-11 1987-12-11

Publications (2)

Publication Number Publication Date
JPH0191509U true JPH0191509U (sh) 1989-06-15
JPH0523291Y2 JPH0523291Y2 (sh) 1993-06-15

Family

ID=31479386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987188284U Expired - Lifetime JPH0523291Y2 (sh) 1987-12-11 1987-12-11

Country Status (1)

Country Link
JP (1) JPH0523291Y2 (sh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05315444A (ja) * 1992-05-11 1993-11-26 Disco Abrasive Syst Ltd ダイシング装置
JPH10270389A (ja) * 1997-03-21 1998-10-09 Seiko Seiki Co Ltd ダイシング装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5534426A (en) * 1978-08-31 1980-03-11 Toshiba Corp Wafer dicing device
JPS60214911A (ja) * 1985-03-11 1985-10-28 株式会社日立製作所 ダイシング装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5534426A (en) * 1978-08-31 1980-03-11 Toshiba Corp Wafer dicing device
JPS60214911A (ja) * 1985-03-11 1985-10-28 株式会社日立製作所 ダイシング装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05315444A (ja) * 1992-05-11 1993-11-26 Disco Abrasive Syst Ltd ダイシング装置
JPH10270389A (ja) * 1997-03-21 1998-10-09 Seiko Seiki Co Ltd ダイシング装置

Also Published As

Publication number Publication date
JPH0523291Y2 (sh) 1993-06-15

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