JPH0189965U - - Google Patents
Info
- Publication number
- JPH0189965U JPH0189965U JP18677687U JP18677687U JPH0189965U JP H0189965 U JPH0189965 U JP H0189965U JP 18677687 U JP18677687 U JP 18677687U JP 18677687 U JP18677687 U JP 18677687U JP H0189965 U JPH0189965 U JP H0189965U
- Authority
- JP
- Japan
- Prior art keywords
- melt
- substrate holder
- substrate
- epitaxial growth
- shutter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 14
- 239000000155 melt Substances 0.000 claims 7
- 239000007791 liquid phase Substances 0.000 claims 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 239000004973 liquid crystal related substance Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18677687U JPH0523585Y2 (https=) | 1987-12-07 | 1987-12-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18677687U JPH0523585Y2 (https=) | 1987-12-07 | 1987-12-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0189965U true JPH0189965U (https=) | 1989-06-13 |
| JPH0523585Y2 JPH0523585Y2 (https=) | 1993-06-16 |
Family
ID=31477984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18677687U Expired - Lifetime JPH0523585Y2 (https=) | 1987-12-07 | 1987-12-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0523585Y2 (https=) |
-
1987
- 1987-12-07 JP JP18677687U patent/JPH0523585Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0523585Y2 (https=) | 1993-06-16 |
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