JPH0189957U - - Google Patents
Info
- Publication number
- JPH0189957U JPH0189957U JP1987186370U JP18637087U JPH0189957U JP H0189957 U JPH0189957 U JP H0189957U JP 1987186370 U JP1987186370 U JP 1987186370U JP 18637087 U JP18637087 U JP 18637087U JP H0189957 U JPH0189957 U JP H0189957U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- distribution chamber
- shower electrode
- outlet holes
- electrode plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987186370U JPH0543096Y2 (cg-RX-API-DMAC10.html) | 1987-12-09 | 1987-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987186370U JPH0543096Y2 (cg-RX-API-DMAC10.html) | 1987-12-09 | 1987-12-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0189957U true JPH0189957U (cg-RX-API-DMAC10.html) | 1989-06-13 |
| JPH0543096Y2 JPH0543096Y2 (cg-RX-API-DMAC10.html) | 1993-10-29 |
Family
ID=31477600
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987186370U Expired - Lifetime JPH0543096Y2 (cg-RX-API-DMAC10.html) | 1987-12-09 | 1987-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543096Y2 (cg-RX-API-DMAC10.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2025108733A (ja) * | 2010-11-30 | 2025-07-23 | 株式会社Kokusai Electric | 基板処理装置、基板処理方法、および半導体装置の製造方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6137969A (ja) * | 1984-07-31 | 1986-02-22 | Canon Inc | プラズマｃｖｄ薄膜製造装置 |
| JPS6187319A (ja) * | 1984-10-05 | 1986-05-02 | Hitachi Ltd | プラズマを用いた化学気相成膜装置 |
| JPS6187872A (ja) * | 1984-10-05 | 1986-05-06 | Hitachi Ltd | 平行平板型プラズマｃｖｄ装置のアノ−ド電極 |
-
1987
- 1987-12-09 JP JP1987186370U patent/JPH0543096Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6137969A (ja) * | 1984-07-31 | 1986-02-22 | Canon Inc | プラズマｃｖｄ薄膜製造装置 |
| JPS6187319A (ja) * | 1984-10-05 | 1986-05-02 | Hitachi Ltd | プラズマを用いた化学気相成膜装置 |
| JPS6187872A (ja) * | 1984-10-05 | 1986-05-06 | Hitachi Ltd | 平行平板型プラズマｃｖｄ装置のアノ−ド電極 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2025108733A (ja) * | 2010-11-30 | 2025-07-23 | 株式会社Kokusai Electric | 基板処理装置、基板処理方法、および半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0543096Y2 (cg-RX-API-DMAC10.html) | 1993-10-29 |