JPH0189884U - - Google Patents

Info

Publication number
JPH0189884U
JPH0189884U JP1987183775U JP18377587U JPH0189884U JP H0189884 U JPH0189884 U JP H0189884U JP 1987183775 U JP1987183775 U JP 1987183775U JP 18377587 U JP18377587 U JP 18377587U JP H0189884 U JPH0189884 U JP H0189884U
Authority
JP
Japan
Prior art keywords
mask
imaging lens
laser
workpiece
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987183775U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987183775U priority Critical patent/JPH0189884U/ja
Publication of JPH0189884U publication Critical patent/JPH0189884U/ja
Pending legal-status Critical Current

Links

JP1987183775U 1987-12-03 1987-12-03 Pending JPH0189884U (fi)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987183775U JPH0189884U (fi) 1987-12-03 1987-12-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987183775U JPH0189884U (fi) 1987-12-03 1987-12-03

Publications (1)

Publication Number Publication Date
JPH0189884U true JPH0189884U (fi) 1989-06-13

Family

ID=31475184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987183775U Pending JPH0189884U (fi) 1987-12-03 1987-12-03

Country Status (1)

Country Link
JP (1) JPH0189884U (fi)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03102887A (ja) * 1989-09-18 1991-04-30 Mitsubishi Electric Corp 固体レーザ装置
JP2008194751A (ja) * 2007-01-15 2008-08-28 Sumitomo Electric Ind Ltd レーザ加工装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03102887A (ja) * 1989-09-18 1991-04-30 Mitsubishi Electric Corp 固体レーザ装置
JP2008194751A (ja) * 2007-01-15 2008-08-28 Sumitomo Electric Ind Ltd レーザ加工装置

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