JPH0189739U - - Google Patents
Info
- Publication number
- JPH0189739U JPH0189739U JP18508887U JP18508887U JPH0189739U JP H0189739 U JPH0189739 U JP H0189739U JP 18508887 U JP18508887 U JP 18508887U JP 18508887 U JP18508887 U JP 18508887U JP H0189739 U JPH0189739 U JP H0189739U
- Authority
- JP
- Japan
- Prior art keywords
- pressurized oxidation
- opening
- gas
- oxidation apparatus
- pressure vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18508887U JPH0189739U (enExample) | 1987-12-04 | 1987-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18508887U JPH0189739U (enExample) | 1987-12-04 | 1987-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0189739U true JPH0189739U (enExample) | 1989-06-13 |
Family
ID=31476416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18508887U Pending JPH0189739U (enExample) | 1987-12-04 | 1987-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0189739U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61198717A (ja) * | 1985-02-28 | 1986-09-03 | Mitsubishi Electric Corp | 化学的気相成長装置 |
| JPS6224630A (ja) * | 1985-07-24 | 1987-02-02 | Mitsubishi Electric Corp | 熱酸化膜形成方法及びその装置 |
-
1987
- 1987-12-04 JP JP18508887U patent/JPH0189739U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61198717A (ja) * | 1985-02-28 | 1986-09-03 | Mitsubishi Electric Corp | 化学的気相成長装置 |
| JPS6224630A (ja) * | 1985-07-24 | 1987-02-02 | Mitsubishi Electric Corp | 熱酸化膜形成方法及びその装置 |