JPH0189738U - - Google Patents

Info

Publication number
JPH0189738U
JPH0189738U JP18508787U JP18508787U JPH0189738U JP H0189738 U JPH0189738 U JP H0189738U JP 18508787 U JP18508787 U JP 18508787U JP 18508787 U JP18508787 U JP 18508787U JP H0189738 U JPH0189738 U JP H0189738U
Authority
JP
Japan
Prior art keywords
heat treatment
treatment furnace
buffer
furnace according
buffers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18508787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH083004Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987185087U priority Critical patent/JPH083004Y2/ja
Publication of JPH0189738U publication Critical patent/JPH0189738U/ja
Application granted granted Critical
Publication of JPH083004Y2 publication Critical patent/JPH083004Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987185087U 1987-12-04 1987-12-04 熱処理炉 Expired - Lifetime JPH083004Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987185087U JPH083004Y2 (ja) 1987-12-04 1987-12-04 熱処理炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987185087U JPH083004Y2 (ja) 1987-12-04 1987-12-04 熱処理炉

Publications (2)

Publication Number Publication Date
JPH0189738U true JPH0189738U (OSRAM) 1989-06-13
JPH083004Y2 JPH083004Y2 (ja) 1996-01-29

Family

ID=31699772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987185087U Expired - Lifetime JPH083004Y2 (ja) 1987-12-04 1987-12-04 熱処理炉

Country Status (1)

Country Link
JP (1) JPH083004Y2 (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016163025A (ja) * 2015-03-05 2016-09-05 三菱電機株式会社 半導体製造装置および半導体デバイスの製造方法
WO2021052917A1 (fr) * 2019-09-20 2021-03-25 Semco Smartech France Dispositif d'homogeneisation

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50159252A (OSRAM) * 1974-06-12 1975-12-23
JPS58130538A (ja) * 1982-01-28 1983-08-04 Matsushita Electric Works Ltd 酸化炉
JPS61166023A (ja) * 1985-01-17 1986-07-26 Matsushita Electronics Corp 半導体ウエハの熱処理方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50159252A (OSRAM) * 1974-06-12 1975-12-23
JPS58130538A (ja) * 1982-01-28 1983-08-04 Matsushita Electric Works Ltd 酸化炉
JPS61166023A (ja) * 1985-01-17 1986-07-26 Matsushita Electronics Corp 半導体ウエハの熱処理方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016163025A (ja) * 2015-03-05 2016-09-05 三菱電機株式会社 半導体製造装置および半導体デバイスの製造方法
WO2021052917A1 (fr) * 2019-09-20 2021-03-25 Semco Smartech France Dispositif d'homogeneisation
TWI861220B (zh) * 2019-09-20 2024-11-11 法商塞姆科智慧科技法國公司 均質裝置

Also Published As

Publication number Publication date
JPH083004Y2 (ja) 1996-01-29

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