JPH0189732U - - Google Patents

Info

Publication number
JPH0189732U
JPH0189732U JP18614487U JP18614487U JPH0189732U JP H0189732 U JPH0189732 U JP H0189732U JP 18614487 U JP18614487 U JP 18614487U JP 18614487 U JP18614487 U JP 18614487U JP H0189732 U JPH0189732 U JP H0189732U
Authority
JP
Japan
Prior art keywords
opening
gas
tube
wafer
inflow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18614487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18614487U priority Critical patent/JPH0189732U/ja
Publication of JPH0189732U publication Critical patent/JPH0189732U/ja
Pending legal-status Critical Current

Links

JP18614487U 1987-12-07 1987-12-07 Pending JPH0189732U (US20100223739A1-20100909-C00025.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18614487U JPH0189732U (US20100223739A1-20100909-C00025.png) 1987-12-07 1987-12-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18614487U JPH0189732U (US20100223739A1-20100909-C00025.png) 1987-12-07 1987-12-07

Publications (1)

Publication Number Publication Date
JPH0189732U true JPH0189732U (US20100223739A1-20100909-C00025.png) 1989-06-13

Family

ID=31477389

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18614487U Pending JPH0189732U (US20100223739A1-20100909-C00025.png) 1987-12-07 1987-12-07

Country Status (1)

Country Link
JP (1) JPH0189732U (US20100223739A1-20100909-C00025.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012212819A (ja) * 2011-03-31 2012-11-01 Tokyo Electron Ltd 縦型バッチ式成膜装置
JP2014518193A (ja) * 2011-07-06 2014-07-28 ダウ グローバル テクノロジーズ エルエルシー 多孔質針状ムライト体の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012212819A (ja) * 2011-03-31 2012-11-01 Tokyo Electron Ltd 縦型バッチ式成膜装置
JP2014518193A (ja) * 2011-07-06 2014-07-28 ダウ グローバル テクノロジーズ エルエルシー 多孔質針状ムライト体の製造方法

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