JPH0189449U - - Google Patents
Info
- Publication number
- JPH0189449U JPH0189449U JP18536987U JP18536987U JPH0189449U JP H0189449 U JPH0189449 U JP H0189449U JP 18536987 U JP18536987 U JP 18536987U JP 18536987 U JP18536987 U JP 18536987U JP H0189449 U JPH0189449 U JP H0189449U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic shield
- spacer
- ion source
- main spacer
- main
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000006850 spacer group Chemical group 0.000 claims description 6
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18536987U JPH0189449U (no) | 1987-12-07 | 1987-12-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18536987U JPH0189449U (no) | 1987-12-07 | 1987-12-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0189449U true JPH0189449U (no) | 1989-06-13 |
Family
ID=31476688
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18536987U Pending JPH0189449U (no) | 1987-12-07 | 1987-12-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0189449U (no) |
-
1987
- 1987-12-07 JP JP18536987U patent/JPH0189449U/ja active Pending