JPH0189449U - - Google Patents
Info
- Publication number
- JPH0189449U JPH0189449U JP18536987U JP18536987U JPH0189449U JP H0189449 U JPH0189449 U JP H0189449U JP 18536987 U JP18536987 U JP 18536987U JP 18536987 U JP18536987 U JP 18536987U JP H0189449 U JPH0189449 U JP H0189449U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic shield
- spacer
- ion source
- main spacer
- main
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000006850 spacer group Chemical group 0.000 claims description 6
Landscapes
- Electron Tubes For Measurement (AREA)
- Electron Sources, Ion Sources (AREA)
Description
第１図は実施例に係るイオン源磁気シールドの
全体構成断面図、第２図は同要部平面図、第３図
は同要部断面図である。
１……イオン源、３……内層磁気シールド、３
……外層磁気シールド、４……遮蔽材、５……ス
ペーサ、６……主スペーサ、７……副スペーサ。
FIG. 1 is a cross-sectional view of the overall configuration of an ion source magnetic shield according to an embodiment, FIG. 2 is a plan view of the main part, and FIG. 3 is a cross-sectional view of the main part. 1...Ion source, 3...Inner layer magnetic shield, 3
... Outer layer magnetic shield, 4 ... Shielding material, 5 ... Spacer, 6 ... Main spacer, 7 ... Sub spacer.
Claims (1)
を内張りした外層磁気シールドとからなり、前記
内層および外層磁気シールド間にスペーサを配設
したイオン源磁気シールドにおいて、前記スペー
サを内層および外層磁気シールドの離間距離に略
等しい長さの主スペーサと、該主スペーサの一端
外周に螺着された大径の副スペーサとより形成し
てなることを特徴とするイオン源磁気シールド。 In an ion source magnetic shield consisting of an inner magnetic shield surrounding an ion source and an outer magnetic shield lined with a shielding material, the spacer is used to separate the inner layer and the outer magnetic shield. An ion source magnetic shield comprising: a main spacer having a length substantially equal to the distance; and a large-diameter sub-spacer screwed onto the outer periphery of one end of the main spacer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18536987U JPH0189449U (en) | 1987-12-07 | 1987-12-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18536987U JPH0189449U (en) | 1987-12-07 | 1987-12-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0189449U true JPH0189449U (en) | 1989-06-13 |
Family
ID=31476688
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18536987U Pending JPH0189449U (en) | 1987-12-07 | 1987-12-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0189449U (en) |
-
1987
- 1987-12-07 JP JP18536987U patent/JPH0189449U/ja active Pending