JPH0189379U - - Google Patents
Info
- Publication number
- JPH0189379U JPH0189379U JP18459187U JP18459187U JPH0189379U JP H0189379 U JPH0189379 U JP H0189379U JP 18459187 U JP18459187 U JP 18459187U JP 18459187 U JP18459187 U JP 18459187U JP H0189379 U JPH0189379 U JP H0189379U
- Authority
- JP
- Japan
- Prior art keywords
- leaf spring
- semiconductor device
- spring contactor
- measuring
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000615 nonconductor Substances 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
Description
第１図はこの考案の一実施例による板ばね接触
子の斜視図、第２図は従来の板ばね接触子の斜視
図、第３図は従来の半導体の測定装置の一実施例
を示す斜視図、第４図ａ，ｂは従来の板ばね接触
子の動作説明図、第５図はこの考案の板ばね接触
子の動作状態を示す説明図である。
図において、１は板ばね接触子、２はスリツト
、３は半導体装置、４はリード、５は搬送レール
、６は不電導体の付着物、７は板ばねを押す接触
機構である。なお、図中同一符号は同一、又は相
当部分を示す。
Fig. 1 is a perspective view of a leaf spring contactor according to an embodiment of this invention, Fig. 2 is a perspective view of a conventional leaf spring contactor, and Fig. 3 is a perspective view showing an embodiment of a conventional semiconductor measuring device. 4A and 4B are explanatory views of the operation of the conventional leaf spring contactor, and FIG. 5 is an explanatory view showing the operating state of the leaf spring contactor of this invention. In the figure, 1 is a leaf spring contact, 2 is a slit, 3 is a semiconductor device, 4 is a lead, 5 is a conveyor rail, 6 is a non-conductor deposit, and 7 is a contact mechanism that presses the leaf spring. Note that the same reference numerals in the figures indicate the same or equivalent parts.
Claims (1)
触子の先端に複数のスリツトを設けたことを特徴
とする半導体装置の測定装置。 A measuring device for a semiconductor device, characterized in that a plurality of slits are provided at the tip of a leaf spring contactor used for measuring electrical characteristics of a semiconductor device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18459187U JPH0189379U (en) | 1987-12-02 | 1987-12-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18459187U JPH0189379U (en) | 1987-12-02 | 1987-12-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0189379U true JPH0189379U (en) | 1989-06-13 |
Family
ID=31475940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18459187U Pending JPH0189379U (en) | 1987-12-02 | 1987-12-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0189379U (en) |
-
1987
- 1987-12-02 JP JP18459187U patent/JPH0189379U/ja active Pending
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