JPH0188094U - - Google Patents

Info

Publication number
JPH0188094U
JPH0188094U JP18324687U JP18324687U JPH0188094U JP H0188094 U JPH0188094 U JP H0188094U JP 18324687 U JP18324687 U JP 18324687U JP 18324687 U JP18324687 U JP 18324687U JP H0188094 U JPH0188094 U JP H0188094U
Authority
JP
Japan
Prior art keywords
magnetic bearing
rotor
pump
bearing formed
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18324687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18324687U priority Critical patent/JPH0188094U/ja
Publication of JPH0188094U publication Critical patent/JPH0188094U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP18324687U 1987-11-30 1987-11-30 Pending JPH0188094U (US06815460-20041109-C00097.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18324687U JPH0188094U (US06815460-20041109-C00097.png) 1987-11-30 1987-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18324687U JPH0188094U (US06815460-20041109-C00097.png) 1987-11-30 1987-11-30

Publications (1)

Publication Number Publication Date
JPH0188094U true JPH0188094U (US06815460-20041109-C00097.png) 1989-06-09

Family

ID=31474675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18324687U Pending JPH0188094U (US06815460-20041109-C00097.png) 1987-11-30 1987-11-30

Country Status (1)

Country Link
JP (1) JPH0188094U (US06815460-20041109-C00097.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0653198A (ja) * 1992-06-03 1994-02-25 Hitachi Ltd 洗浄剤、および、これを用いた半導体基板の洗浄方法
JP2011529542A (ja) * 2008-07-31 2011-12-08 オーリコン レイボルド バキューム ゲーエムベーハー 真空ポンプ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5177746A (US06815460-20041109-C00097.png) * 1974-12-06 1976-07-06 Teldix Gmbh

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5177746A (US06815460-20041109-C00097.png) * 1974-12-06 1976-07-06 Teldix Gmbh

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0653198A (ja) * 1992-06-03 1994-02-25 Hitachi Ltd 洗浄剤、および、これを用いた半導体基板の洗浄方法
JP2011529542A (ja) * 2008-07-31 2011-12-08 オーリコン レイボルド バキューム ゲーエムベーハー 真空ポンプ

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