JPH0187535U - - Google Patents
Info
- Publication number
- JPH0187535U JPH0187535U JP18398887U JP18398887U JPH0187535U JP H0187535 U JPH0187535 U JP H0187535U JP 18398887 U JP18398887 U JP 18398887U JP 18398887 U JP18398887 U JP 18398887U JP H0187535 U JPH0187535 U JP H0187535U
- Authority
- JP
- Japan
- Prior art keywords
- pure water
- washing tank
- washing
- nozzle
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005406 washing Methods 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
- 230000005587 bubbling Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18398887U JPH0187535U (ko) | 1987-12-01 | 1987-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18398887U JPH0187535U (ko) | 1987-12-01 | 1987-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187535U true JPH0187535U (ko) | 1989-06-09 |
Family
ID=31475382
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18398887U Pending JPH0187535U (ko) | 1987-12-01 | 1987-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187535U (ko) |
-
1987
- 1987-12-01 JP JP18398887U patent/JPH0187535U/ja active Pending