JPH0187532U - - Google Patents
Info
- Publication number
- JPH0187532U JPH0187532U JP18416387U JP18416387U JPH0187532U JP H0187532 U JPH0187532 U JP H0187532U JP 18416387 U JP18416387 U JP 18416387U JP 18416387 U JP18416387 U JP 18416387U JP H0187532 U JPH0187532 U JP H0187532U
- Authority
- JP
- Japan
- Prior art keywords
- charged beam
- chamber
- column
- exposure apparatus
- beam exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000013016 damping Methods 0.000 description 2
- 241001406386 Leucaena trichodes Species 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18416387U JPH0187532U (enExample) | 1987-12-01 | 1987-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18416387U JPH0187532U (enExample) | 1987-12-01 | 1987-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187532U true JPH0187532U (enExample) | 1989-06-09 |
Family
ID=31475542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18416387U Pending JPH0187532U (enExample) | 1987-12-01 | 1987-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187532U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011043391A1 (ja) * | 2009-10-07 | 2011-04-14 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
| JP2017195304A (ja) * | 2016-04-21 | 2017-10-26 | 株式会社ニューフレアテクノロジー | 荷電粒子ビーム装置 |
-
1987
- 1987-12-01 JP JP18416387U patent/JPH0187532U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011043391A1 (ja) * | 2009-10-07 | 2011-04-14 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
| JPWO2011043391A1 (ja) * | 2009-10-07 | 2013-03-04 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
| JP2017195304A (ja) * | 2016-04-21 | 2017-10-26 | 株式会社ニューフレアテクノロジー | 荷電粒子ビーム装置 |