JPH0187256U - - Google Patents
Info
- Publication number
- JPH0187256U JPH0187256U JP18194487U JP18194487U JPH0187256U JP H0187256 U JPH0187256 U JP H0187256U JP 18194487 U JP18194487 U JP 18194487U JP 18194487 U JP18194487 U JP 18194487U JP H0187256 U JPH0187256 U JP H0187256U
- Authority
- JP
- Japan
- Prior art keywords
- probe
- probe body
- pin
- insulator
- current supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims description 24
- 238000005259 measurement Methods 0.000 claims description 5
- 239000012212 insulator Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Measuring Leads Or Probes (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987181944U JPH0611464Y2 (ja) | 1987-12-01 | 1987-12-01 | 抵抗測定用プローブ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987181944U JPH0611464Y2 (ja) | 1987-12-01 | 1987-12-01 | 抵抗測定用プローブ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0187256U true JPH0187256U (US20090163788A1-20090625-C00002.png) | 1989-06-08 |
| JPH0611464Y2 JPH0611464Y2 (ja) | 1994-03-23 |
Family
ID=31473406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987181944U Expired - Lifetime JPH0611464Y2 (ja) | 1987-12-01 | 1987-12-01 | 抵抗測定用プローブ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0611464Y2 (US20090163788A1-20090625-C00002.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009156737A (ja) * | 2007-12-27 | 2009-07-16 | Fujitsu Microelectronics Ltd | 検査冶具及びそれを使用した静電容量測定方法 |
| JP2014055879A (ja) * | 2012-09-13 | 2014-03-27 | Hioki Ee Corp | 基板検査装置および基板検査方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5741169U (US20090163788A1-20090625-C00002.png) * | 1980-08-20 | 1982-03-05 | ||
| JPS5768046A (en) * | 1980-10-16 | 1982-04-26 | Nec Corp | Probe card |
| JPS5997469U (ja) * | 1982-12-20 | 1984-07-02 | 株式会社東芝 | 半導体チツプ測定用探針 |
| JPS62217165A (ja) * | 1986-03-19 | 1987-09-24 | Toshiba Corp | 検査用接触体 |
-
1987
- 1987-12-01 JP JP1987181944U patent/JPH0611464Y2/ja not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5741169U (US20090163788A1-20090625-C00002.png) * | 1980-08-20 | 1982-03-05 | ||
| JPS5768046A (en) * | 1980-10-16 | 1982-04-26 | Nec Corp | Probe card |
| JPS5997469U (ja) * | 1982-12-20 | 1984-07-02 | 株式会社東芝 | 半導体チツプ測定用探針 |
| JPS62217165A (ja) * | 1986-03-19 | 1987-09-24 | Toshiba Corp | 検査用接触体 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009156737A (ja) * | 2007-12-27 | 2009-07-16 | Fujitsu Microelectronics Ltd | 検査冶具及びそれを使用した静電容量測定方法 |
| JP2014055879A (ja) * | 2012-09-13 | 2014-03-27 | Hioki Ee Corp | 基板検査装置および基板検査方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0611464Y2 (ja) | 1994-03-23 |
