JPH0187159U - - Google Patents
Info
- Publication number
- JPH0187159U JPH0187159U JP18119487U JP18119487U JPH0187159U JP H0187159 U JPH0187159 U JP H0187159U JP 18119487 U JP18119487 U JP 18119487U JP 18119487 U JP18119487 U JP 18119487U JP H0187159 U JPH0187159 U JP H0187159U
- Authority
- JP
- Japan
- Prior art keywords
- chemical vapor
- gas introduction
- vapor plating
- gas
- plating surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007747 plating Methods 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18119487U JPH0187159U (sk) | 1987-11-30 | 1987-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18119487U JPH0187159U (sk) | 1987-11-30 | 1987-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187159U true JPH0187159U (sk) | 1989-06-08 |
Family
ID=31472691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18119487U Pending JPH0187159U (sk) | 1987-11-30 | 1987-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187159U (sk) |
-
1987
- 1987-11-30 JP JP18119487U patent/JPH0187159U/ja active Pending