JPH0187155U - - Google Patents
Info
- Publication number
- JPH0187155U JPH0187155U JP18250487U JP18250487U JPH0187155U JP H0187155 U JPH0187155 U JP H0187155U JP 18250487 U JP18250487 U JP 18250487U JP 18250487 U JP18250487 U JP 18250487U JP H0187155 U JPH0187155 U JP H0187155U
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- target
- view
- sputtering apparatus
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 230000002265 prevention Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18250487U JPH0187155U (cs) | 1987-11-30 | 1987-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18250487U JPH0187155U (cs) | 1987-11-30 | 1987-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187155U true JPH0187155U (cs) | 1989-06-08 |
Family
ID=31473951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18250487U Pending JPH0187155U (cs) | 1987-11-30 | 1987-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187155U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02298263A (ja) * | 1989-05-12 | 1990-12-10 | Tokyo Electron Ltd | スパッタ装置 |
-
1987
- 1987-11-30 JP JP18250487U patent/JPH0187155U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02298263A (ja) * | 1989-05-12 | 1990-12-10 | Tokyo Electron Ltd | スパッタ装置 |