JPS63106761U - - Google Patents
Info
- Publication number
- JPS63106761U JPS63106761U JP20188586U JP20188586U JPS63106761U JP S63106761 U JPS63106761 U JP S63106761U JP 20188586 U JP20188586 U JP 20188586U JP 20188586 U JP20188586 U JP 20188586U JP S63106761 U JPS63106761 U JP S63106761U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- lower receiving
- film
- chamber
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims 6
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20188586U JPS63106761U (cs) | 1986-12-27 | 1986-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20188586U JPS63106761U (cs) | 1986-12-27 | 1986-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63106761U true JPS63106761U (cs) | 1988-07-09 |
Family
ID=31165759
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20188586U Pending JPS63106761U (cs) | 1986-12-27 | 1986-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63106761U (cs) |
-
1986
- 1986-12-27 JP JP20188586U patent/JPS63106761U/ja active Pending