JPH0186235U - - Google Patents
Info
- Publication number
- JPH0186235U JPH0186235U JP18326287U JP18326287U JPH0186235U JP H0186235 U JPH0186235 U JP H0186235U JP 18326287 U JP18326287 U JP 18326287U JP 18326287 U JP18326287 U JP 18326287U JP H0186235 U JPH0186235 U JP H0186235U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- etching depth
- mesa groove
- shallow
- deep
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims 3
- 230000002093 peripheral effect Effects 0.000 claims 1
- 230000001681 protective effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Weting (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18326287U JPH0186235U (et) | 1987-11-30 | 1987-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18326287U JPH0186235U (et) | 1987-11-30 | 1987-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0186235U true JPH0186235U (et) | 1989-06-07 |
Family
ID=31474691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18326287U Pending JPH0186235U (et) | 1987-11-30 | 1987-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0186235U (et) |
-
1987
- 1987-11-30 JP JP18326287U patent/JPH0186235U/ja active Pending
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