JPH0186228U - - Google Patents
Info
- Publication number
- JPH0186228U JPH0186228U JP18312387U JP18312387U JPH0186228U JP H0186228 U JPH0186228 U JP H0186228U JP 18312387 U JP18312387 U JP 18312387U JP 18312387 U JP18312387 U JP 18312387U JP H0186228 U JPH0186228 U JP H0186228U
- Authority
- JP
- Japan
- Prior art keywords
- window member
- lamp chamber
- chamber
- transported
- dedicated cart
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000006552 photochemical reaction Methods 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 230000032258 transport Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18312387U JPH0186228U (de) | 1987-11-30 | 1987-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18312387U JPH0186228U (de) | 1987-11-30 | 1987-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0186228U true JPH0186228U (de) | 1989-06-07 |
Family
ID=31474555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18312387U Pending JPH0186228U (de) | 1987-11-30 | 1987-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0186228U (de) |
-
1987
- 1987-11-30 JP JP18312387U patent/JPH0186228U/ja active Pending
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