JPH0186052U - - Google Patents

Info

Publication number
JPH0186052U
JPH0186052U JP18149687U JP18149687U JPH0186052U JP H0186052 U JPH0186052 U JP H0186052U JP 18149687 U JP18149687 U JP 18149687U JP 18149687 U JP18149687 U JP 18149687U JP H0186052 U JPH0186052 U JP H0186052U
Authority
JP
Japan
Prior art keywords
hole
aperture
charged
opening
charged beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18149687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18149687U priority Critical patent/JPH0186052U/ja
Publication of JPH0186052U publication Critical patent/JPH0186052U/ja
Pending legal-status Critical Current

Links

JP18149687U 1987-11-27 1987-11-27 Pending JPH0186052U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18149687U JPH0186052U (enrdf_load_stackoverflow) 1987-11-27 1987-11-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18149687U JPH0186052U (enrdf_load_stackoverflow) 1987-11-27 1987-11-27

Publications (1)

Publication Number Publication Date
JPH0186052U true JPH0186052U (enrdf_load_stackoverflow) 1989-06-07

Family

ID=31472979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18149687U Pending JPH0186052U (enrdf_load_stackoverflow) 1987-11-27 1987-11-27

Country Status (1)

Country Link
JP (1) JPH0186052U (enrdf_load_stackoverflow)

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