JPH0185606U - - Google Patents
Info
- Publication number
- JPH0185606U JPH0185606U JP18210287U JP18210287U JPH0185606U JP H0185606 U JPH0185606 U JP H0185606U JP 18210287 U JP18210287 U JP 18210287U JP 18210287 U JP18210287 U JP 18210287U JP H0185606 U JPH0185606 U JP H0185606U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- surface plate
- support rod
- flat
- flatness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003028 elevating effect Effects 0.000 description 2
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18210287U JPH0185606U (OSRAM) | 1987-11-30 | 1987-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18210287U JPH0185606U (OSRAM) | 1987-11-30 | 1987-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0185606U true JPH0185606U (OSRAM) | 1989-06-07 |
Family
ID=31473557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18210287U Pending JPH0185606U (OSRAM) | 1987-11-30 | 1987-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0185606U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008116354A (ja) * | 2006-11-06 | 2008-05-22 | Nec Electronics Corp | 反り測定システム、成膜システム、及び反り測定方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53105261A (en) * | 1977-02-25 | 1978-09-13 | Hitachi Ltd | Shape measuring method of plate form objects |
-
1987
- 1987-11-30 JP JP18210287U patent/JPH0185606U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53105261A (en) * | 1977-02-25 | 1978-09-13 | Hitachi Ltd | Shape measuring method of plate form objects |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008116354A (ja) * | 2006-11-06 | 2008-05-22 | Nec Electronics Corp | 反り測定システム、成膜システム、及び反り測定方法 |
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