JPH0184438U - - Google Patents
Info
- Publication number
- JPH0184438U JPH0184438U JP1987179566U JP17956687U JPH0184438U JP H0184438 U JPH0184438 U JP H0184438U JP 1987179566 U JP1987179566 U JP 1987179566U JP 17956687 U JP17956687 U JP 17956687U JP H0184438 U JPH0184438 U JP H0184438U
- Authority
- JP
- Japan
- Prior art keywords
- rails
- tables
- axis direction
- piezoelectric motor
- sample moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987179566U JPH0184438U (cs) | 1987-11-27 | 1987-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987179566U JPH0184438U (cs) | 1987-11-27 | 1987-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0184438U true JPH0184438U (cs) | 1989-06-05 |
Family
ID=31471113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987179566U Pending JPH0184438U (cs) | 1987-11-27 | 1987-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0184438U (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000028652A1 (en) * | 1998-11-05 | 2000-05-18 | Japan Science And Technology Corporation | Ultrasonic motor |
| JP2002329771A (ja) * | 2001-04-26 | 2002-11-15 | Kyocera Corp | ステージ装置 |
-
1987
- 1987-11-27 JP JP1987179566U patent/JPH0184438U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000028652A1 (en) * | 1998-11-05 | 2000-05-18 | Japan Science And Technology Corporation | Ultrasonic motor |
| JP2002329771A (ja) * | 2001-04-26 | 2002-11-15 | Kyocera Corp | ステージ装置 |
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