JPH0184429U - - Google Patents

Info

Publication number

JPH0184429U

JPH0184429U JP1987180268U JP18026887U JPH0184429U JP H0184429 U JPH0184429 U JP H0184429U JP 1987180268 U JP1987180268 U JP 1987180268U JP 18026887 U JP18026887 U JP 18026887U JP H0184429 U JPH0184429 U JP H0184429U

Authority

JP

Japan

Prior art keywords

semiconductor substrate

washing tank

pure water

supply pipe

immersed

Prior art date

1987-11-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
• 238000005406 washing Methods 0.000 claims description 6
• 239000004065 semiconductor Substances 0.000 claims description 4
• 239000000758 substrate Substances 0.000 claims description 3
• 238000004519 manufacturing process Methods 0.000 claims 1
• 239000000126 substance Substances 0.000 claims 1