JPH0184427U - - Google Patents
Info
- Publication number
- JPH0184427U JPH0184427U JP1987180246U JP18024687U JPH0184427U JP H0184427 U JPH0184427 U JP H0184427U JP 1987180246 U JP1987180246 U JP 1987180246U JP 18024687 U JP18024687 U JP 18024687U JP H0184427 U JPH0184427 U JP H0184427U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- chamber
- photoresist
- supply port
- wavelength
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 229920002120 photoresistant polymer Polymers 0.000 claims description 3
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 2
- 238000004380 ashing Methods 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987180246U JPH0184427U (enExample) | 1987-11-26 | 1987-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987180246U JPH0184427U (enExample) | 1987-11-26 | 1987-11-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0184427U true JPH0184427U (enExample) | 1989-06-05 |
Family
ID=31471767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987180246U Pending JPH0184427U (enExample) | 1987-11-26 | 1987-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0184427U (enExample) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6298729A (ja) * | 1985-10-25 | 1987-05-08 | Mitsubishi Electric Corp | 紫外線とオゾンを用いた表面処理装置 |
| JPS62154629A (ja) * | 1985-12-27 | 1987-07-09 | Chlorine Eng Corp Ltd | 有機物被膜の除去方法 |
| JPS63260132A (ja) * | 1987-04-17 | 1988-10-27 | Hitachi Ltd | 表面改質装置 |
| JPS6464323A (en) * | 1987-09-04 | 1989-03-10 | Hitachi Ltd | Optical gas ashing device |
-
1987
- 1987-11-26 JP JP1987180246U patent/JPH0184427U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6298729A (ja) * | 1985-10-25 | 1987-05-08 | Mitsubishi Electric Corp | 紫外線とオゾンを用いた表面処理装置 |
| JPS62154629A (ja) * | 1985-12-27 | 1987-07-09 | Chlorine Eng Corp Ltd | 有機物被膜の除去方法 |
| JPS63260132A (ja) * | 1987-04-17 | 1988-10-27 | Hitachi Ltd | 表面改質装置 |
| JPS6464323A (en) * | 1987-09-04 | 1989-03-10 | Hitachi Ltd | Optical gas ashing device |