JPH0184424U - - Google Patents

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Publication number
JPH0184424U
JPH0184424U JP1987179746U JP17974687U JPH0184424U JP H0184424 U JPH0184424 U JP H0184424U JP 1987179746 U JP1987179746 U JP 1987179746U JP 17974687 U JP17974687 U JP 17974687U JP H0184424 U JPH0184424 U JP H0184424U
Authority
JP
Japan
Prior art keywords
case
clean bench
utility
portable clean
floorboard
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987179746U
Other languages
English (en)
Other versions
JPH0614473Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987179746U priority Critical patent/JPH0614473Y2/ja
Publication of JPH0184424U publication Critical patent/JPH0184424U/ja
Application granted granted Critical
Publication of JPH0614473Y2 publication Critical patent/JPH0614473Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【図面の簡単な説明】
第1図は本考案の一実施例の構成を示し、aは
側面図、bは平面図である。 1……プレフイルタ、2……送風機、3……メ
インフイルタ、4……清浄空間領域、5……仕切
板、6……空気ぬき孔、7……扉、8……充電式
電池、9……車輪、10……風の流れ。

Claims (1)

  1. 【実用新案登録請求の範囲】 1 筐体内の上部にエアフイルタと送風装置を設
    け、筐体内の下部に送風装置を駆動するための電
    源を設け、筐体の側壁の下部または筐体の床板に
    空気ぬき孔を設け、筐体の床板の下部に車輪を設
    けたことを特徴とする可搬式クリーンベンチ。 2 筐体内の中部にパンチング孔を多数有する物
    品を置くための仕切板を設けたことを特徴とする
    実用新案登録請求の範囲第1項記載の可搬式クリ
    ーンベンチ。 3 筐体の天井と床板を除く4側面のうち、相対
    する2側面にだけ180°開く扉を設けたことを
    特徴とする実用新案登録請求の範囲第1項記載の
    可搬式クリーンベンチ。
JP1987179746U 1987-11-27 1987-11-27 可搬式クリーンベンチ Expired - Lifetime JPH0614473Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987179746U JPH0614473Y2 (ja) 1987-11-27 1987-11-27 可搬式クリーンベンチ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987179746U JPH0614473Y2 (ja) 1987-11-27 1987-11-27 可搬式クリーンベンチ

Publications (2)

Publication Number Publication Date
JPH0184424U true JPH0184424U (ja) 1989-06-05
JPH0614473Y2 JPH0614473Y2 (ja) 1994-04-13

Family

ID=31471291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987179746U Expired - Lifetime JPH0614473Y2 (ja) 1987-11-27 1987-11-27 可搬式クリーンベンチ

Country Status (1)

Country Link
JP (1) JPH0614473Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09180974A (ja) * 1995-12-26 1997-07-11 Dainippon Screen Mfg Co Ltd エアフィルタを備えた基板処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09180974A (ja) * 1995-12-26 1997-07-11 Dainippon Screen Mfg Co Ltd エアフィルタを備えた基板処理装置

Also Published As

Publication number Publication date
JPH0614473Y2 (ja) 1994-04-13

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