JPH0183468U - - Google Patents
Info
- Publication number
- JPH0183468U JPH0183468U JP1987176694U JP17669487U JPH0183468U JP H0183468 U JPH0183468 U JP H0183468U JP 1987176694 U JP1987176694 U JP 1987176694U JP 17669487 U JP17669487 U JP 17669487U JP H0183468 U JPH0183468 U JP H0183468U
- Authority
- JP
- Japan
- Prior art keywords
- coating
- roller
- spiral grooves
- pitch
- coating device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 9
- 238000000576 coating method Methods 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 2
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Description
第１図ａは本考案の第１の実施例の断面図、第
１図ｂはコーテイングローラの周面を示す正面図
、第２図は本考案の第２の実施例の断面図、第３
図は従来のレジスト塗布装置の断面図である。
１，２，７，１０…コーテイングローラ、３，
８，１１…ドクターローラ、４，９，１２…レジ
スト、５，１３…搬送ローラ、６，１４…被塗布
基板。
FIG. 1a is a cross-sectional view of the first embodiment of the present invention, FIG. 1b is a front view showing the circumferential surface of the coating roller, FIG. 2 is a cross-sectional view of the second embodiment of the present invention, and FIG.
The figure is a sectional view of a conventional resist coating device. 1, 2, 7, 10... coating roller, 3,
8, 11... Doctor roller, 4, 9, 12... Resist, 5, 13... Conveyance roller, 6, 14... Substrate to be coated.
Claims (1)
ーラと、該コーテイングローラに接触したドクタ
ーローラとを有するフオトレジスト等の塗布装置
において、基板の搬送方向に沿つて前後に近接す
る少なくとも２本のコーテイングローラを有し、
該２本のコーテイングローラのらせん溝のピツチ
およびらせん方向を互いに異ならせたことを特徴
とする塗布装置。 A coating device for photoresist or the like having a coating roller provided with spiral grooves of a constant pitch and a doctor roller in contact with the coating roller, which includes at least two coating rollers adjacent to each other in the front and back along the conveyance direction of the substrate. death,
A coating device characterized in that the pitch and direction of the spiral grooves of the two coating rollers are different from each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987176694U JPH0183468U (en) | 1987-11-19 | 1987-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987176694U JPH0183468U (en) | 1987-11-19 | 1987-11-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0183468U true JPH0183468U (en) | 1989-06-02 |
Family
ID=31468408
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987176694U Pending JPH0183468U (en) | 1987-11-19 | 1987-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0183468U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03280416A (en) * | 1990-03-29 | 1991-12-11 | G T C:Kk | Resist pattern forming method |
-
1987
- 1987-11-19 JP JP1987176694U patent/JPH0183468U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03280416A (en) * | 1990-03-29 | 1991-12-11 | G T C:Kk | Resist pattern forming method |