JPH0183328U - - Google Patents
Info
- Publication number
- JPH0183328U JPH0183328U JP1987178556U JP17855687U JPH0183328U JP H0183328 U JPH0183328 U JP H0183328U JP 1987178556 U JP1987178556 U JP 1987178556U JP 17855687 U JP17855687 U JP 17855687U JP H0183328 U JPH0183328 U JP H0183328U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- nozzle
- dropper
- discharging
- coating apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 230000006835 compression Effects 0.000 claims description 2
- 238000007906 compression Methods 0.000 claims description 2
- 238000007599 discharging Methods 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 1
- 238000013022 venting Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987178556U JPH0183328U (cs) | 1987-11-24 | 1987-11-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987178556U JPH0183328U (cs) | 1987-11-24 | 1987-11-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0183328U true JPH0183328U (cs) | 1989-06-02 |
Family
ID=31470166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987178556U Pending JPH0183328U (cs) | 1987-11-24 | 1987-11-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0183328U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011204948A (ja) * | 2010-03-26 | 2011-10-13 | Dainippon Screen Mfg Co Ltd | 処理液供給装置および処理液供給方法 |
-
1987
- 1987-11-24 JP JP1987178556U patent/JPH0183328U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011204948A (ja) * | 2010-03-26 | 2011-10-13 | Dainippon Screen Mfg Co Ltd | 処理液供給装置および処理液供給方法 |
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